A system for testing resistive memory array

Abstract

The invention discloses a system for testing a resistive memory array, comprising: a probe station for carrying the resistive memory array to be tested; a probe card for realizing the connection between the hardware address circuit and the resistive memory array to be tested Good connection; the hardware address selection circuit is used to complete the address decoding and gating work of the designated port of the resistance variable memory array to be tested; the constant voltage source meter is used to provide DC voltage to the hardware address selection circuit; the measurement source meter is used to Provide the operating voltage required for device testing; the control host is used to control the entire system to perform different types of test operations, and complete the output and statistical analysis of test result data. Aiming at the problem that the performance of the resistive memory array with a special structure cannot be evaluated, the present invention uses the existing experimental equipment to not only realize the test and evaluation of the device performance at low cost, but also provide a basis for the subsequent test and detection of other array structure devices. A way of thinking and method.

Description

technical field [0001] The invention relates to the technical field of semiconductor testing in microelectronics, in particular to a system for testing novel resistive memory arrays with structures such as CrossBar and 1T1R. Background technique [0002] With the advent of the era of mass storage, storage technology has become the main driving force for the advancement of semiconductor technology and has dominated the global semiconductor market. Semiconductor memory products also have an irreplaceable position in my country, occupying the largest market share in the entire integrated circuit industry. [0003] Resistive memory, as a memory that uses a non-charge storage mechanism, will have a lot of room for development below the 32nm process node, and the design of resistive memory arrays that meet the needs of large-scale production and applications is extremely critical. Testing memory arrays is also an issue that requires constant research and exploration. [0004] At...

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Problems solved by technology

[0004] At present, the array testing machine for testing resistive memory arrays on the market is expensive, and there is no comprehensive testing method for the development of new resistive memory arrays with special structures. The main technical problems faced are: how to meet the requirements of new storage technology Requirements for multifunctional comprehensive testing from materials, devices to arrays; how to embed design software into the system in software and hardware control to complete automatic addressing of storage cells in storage arrays and automatic conversion of array test modes, etc.

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