Positive pressure leakage hole calibration device and method based on static accumulation attenuation comparison method

Abstract

The invention provides a positive pressure leakage hole calibration device and method based on a static accumulation attenuation comparison method. By means of the device and method, calibration on positive pressure leakage holes can be achieved; in addition, the calibration range is wide, and calibration on a plurality of kinds of leak indication gas is achieved. The device is mainly composed of a gas exhaust system, a helium mass spectrometer leak detector and two sampling systems; each sampling system comprises a pressure meter, a gas collecting room, a first stop valve, a second stop valve, a third stop valve, a sampling room and a capillary tube. The connected relations include that each pressure meter is connected with the corresponding gas collecting room, each gas collecting room is connected with a gas inlet of the corresponding sampling room through the corresponding first stop valve, a gas outlet of each sampling room is sequentially connected with the helium mass spectrometer leak detector through the corresponding second stop valve, the corresponding capillary tube and the corresponding third stop valve. The gas exhaust system is mainly composed of a gas exhaust pump, a stop valve A and a stop valve B. The gas exhaust pump is connected with the sampling room of one sampling system through the stop valve A, and connected with the sampling room of the other sampling system through the stop valve B.

Description

technical field [0001] The invention relates to a positive pressure leak calibration device and method based on a static cumulative attenuation comparison method, which belongs to the technical field of measurement. Background technique [0002] In the document "Design of constant pressure positive pressure leak calibration device, "Journal of Vacuum Science and Technology", No. 5, 2007, pages 442-446", a method of calibrating positive pressure leaks using constant pressure method is introduced. Hole method, this method is to directly introduce the leakage gas flowing out of the positive pressure leak hole into the variable volume chamber of the positive pressure leak calibration device of the constant pressure method, and change the displacement of the piston to increase the volume of the variable volume chamber to ensure the variable volume The principle of constant indoor pressure realizes the calibration of positive pressure leaks. [0003] The disadvantage of this meth...

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Problems solved by technology

[0003] The disadvantage of this method is that during calibration, the calibration device is complicated, and the calibration device needs an exhaust system, a calibration system, and a measurement and control system. The calibration device has high technical content, is expensive, and has high requirements for researchers and operators.

Secondly, the positive pressure leak can only be calibrated by the constant pressure method, and the calibration range of the constant pressure method is narrow

Again, only one positive pressure leak can be calibrated at a time, which cannot be used for mass calibration work, and the calibration efficiency is low

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