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Micro-displacement measurement system using double adjustable light source Fabry-Perot interferometer

A technology of Perot interferometer and measurement system, applied in the field of micro-displacement measurement system, can solve problems such as limited measurement range, achieve the effects of large measurement range, high measurement resolution, solution of measurement resolution and expansion of measurement range

Active Publication Date: 2017-01-18
BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to overcome the limitations of the Fabry-Perot interferometer in the measurement range, solve the calibration problem of the nano-scale laser interferometer and the high-precision micro-displacement sensor, and provide a dual-adjustable light source Fabry - Micro-displacement measurement system of Perot interferometer

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  • Micro-displacement measurement system using double adjustable light source Fabry-Perot interferometer

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Embodiment 1

[0026] The micro-displacement measurement system adopting dual adjustable light source Fabry-Perot interferometer of the present invention includes: frequency-stabilized laser source, adjustable laser source A, adjustable laser source B, reference mirror, measurement mirror , Polarization beam splitter, beam splitter, plane mirror, photoelectric receiver and high-speed photoelectric receiver.

[0027] Taking tunable laser source A as a starting point, explain the positional relationship between the components of the system:

[0028] The right side of the tunable laser source A is two polarizing beam splitters. The right side of the polarizing beam splitter is the reference mirror and the measuring mirror in sequence. The two mirrors form a Fabry-Perot cavity. The right side of the measuring mirror The side is a polarization beam splitter, and the right and above the polarization beam splitter are photoelectric receivers;

[0029] Tunable laser source A is above tunable laser source ...

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Abstract

The invention relates to a micro displacement measuring system with double laser-source-adjustable Fabry-Perot interferometers, and belongs to the technical field of geometrical product measurement. According to the measuring system, two Fabry-Perot interferometers with wavelength-adjustable lasers as light sources are used for measuring the displacement of a measured target, the two adjustable light sources are used for alternately tracking the frequencies of different resonant modes of Fabry-Perot cavities, and the range of displacement measurement is broadened while it is guaranteed that the Fabry-Perot interferometers have the high measurement resolving ability. The micro displacement measuring system effectively solves the conflict between the improvement of the interferometer measurement resolving ability and the broadening of the measurement range, and can be applied to micro displacement measurement with nanometer-level accuracy.

Description

Technical field [0001] The invention relates to a micro-displacement measurement system adopting a double adjustable laser source Fabry-Perot interferometer, which belongs to the technical field of geometric quantity measurement. Background technique [0002] The development of nanotechnology has put forward an urgent need for high-accuracy micro-displacement measurement technology. Laser interferometric measurement technology has always been dominant in high-accuracy micro-displacement measurement due to its traceability and high measurement resolution. The measurement accuracy can reach the nanometer level. However, when combined with a scanning probe microscope for traceable measurement of micro / nano surface topography, the measurement accuracy of an interferometer is generally lower than that of a scanning probe microscope by more than an order of magnitude. Traditional interferometers have been Cannot meet the calibration requirements of scanning probe microscope instrument...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
Inventor 任冬梅朱振宇李华丰段小艳李强
Owner BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA