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Method of fabricating sputtering target, sputtering target using the method, and method of manufacturing organic light-emitting display apparatus using the sputtering target

By mixing materials such as tin oxide and carbon in the sputtering target, and compressing and sintering in a reducing atmosphere, a low-resistance sputtering target is formed, which solves the problem of excessive resistance when depositing insulating inorganic materials by sputtering and achieves Efficient thin film packaging for organic light-emitting display devices.

Inactive Publication Date: 2015-01-14
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the material forming the thin film encapsulation is an insulating inorganic material, the sputtering target also needs to be formed of an insulating inorganic material, however such a target has excessive resistance, in other words, has a small electrical conductivity, so the target may not be able to maintain a higher temperature than the substrate. more negative charges
In such cases, it can be difficult to deposit insulating inorganic materials using sputtering

Method used

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Examples

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Embodiment Construction

[0032] The present invention will be described more fully hereinafter with reference to the accompanying drawings, in which various embodiments are shown. However, the invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Like reference numerals refer to like elements throughout.

[0033] It will be understood that when an element is referred to as being "on" another element, it can be directly on the other element or intervening elements may be present therebetween. In contrast, when an element is referred to as being "directly on" another element, there are no intervening elements present.

[0034] It should be understood that although the terms "first", "second", "third", etc. may be used herein to describe various elements, compone...

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Abstract

A method of fabricating a sputtering target includes preparing a first powder material including at least one of a tin oxide and a mesh-forming oxide; mixing the first powder material and a second powder material comprising carbon or a tin oxide to prepare a mixture; simultaneously performing a primary compression and primary sintering on the mixture in a reduction atmosphere; and simultaneously performing a secondary compression and secondary sintering on the mixture in the reduction atmosphere to prepare the sputtering target.

Description

[0001] This application claims priority to Korean Patent Application No. 10-2013-0082438, filed on Jul. 12, 2013, and all benefits arising therefrom, the entire contents of which are incorporated herein by reference. Technical Field [0002] One or more embodiments of the present invention relate to a method of manufacturing a sputtering target, a sputtering target using the method, and a method of producing an organic light emitting display device using the sputtering target. Background Art [0003] Organic light emitting display devices are self-luminous display devices that are advantageous in having excellent brightness, driving voltage, and response speed characteristics, and are advantageous in being able to realize a variety of colors and having a wide viewing angle, excellent contrast, and a rapid response time. [0004] An organic light emitting display device may include an organic light emitting diode ("OLED"). OLEDs are susceptible to damage from moisture and oxyg...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34H01L51/56
CPCC23C14/086H01J37/3429C23C14/3414H01J2237/332C23C14/08H10K71/00H10K59/873H01J37/3414H01J37/3426C23C14/34H10K50/844
Owner SAMSUNG DISPLAY CO LTD