Dual-wavelength Fizeau laser interferometer standard reference mirror

A laser interferometer, standard reference technology, used in instruments, optical devices, measuring devices, etc.

Inactive Publication Date: 2015-01-28
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The working wavelength of the above-mentioned standard reference mirrors is 632.8nm, but there is no similar product for the standard reference mirror of the dual-wavelength Fizeau laser interferometer

Method used

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  • Dual-wavelength Fizeau laser interferometer standard reference mirror
  • Dual-wavelength Fizeau laser interferometer standard reference mirror

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Embodiment Construction

[0012] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0013] Such as figure 2 As shown, a standard reference mirror of a dual-wavelength Fizeau laser interferometer, the reference mirror includes: a diaphragm 4, a lens component 5 and a reference surface 6; The aperture of the incident light is matched with the aperture of the lens component 5; the lens component 5 converges the incident light on the spherical center of the reference surface 6.

[0014] Wherein, the diaphragm 4 is an aperture diaphragm, and the aperture diaphragm is a metal light-shielding sheet with a light hole in the center for blackening treatment. The lens component 5 is a transparent glass material, the number is 1 to 4 pieces; the lens component 5 is used to balance the aberration of the system, so that the wave aberration of the system is better than one wavelength at two working wavelengths. The working wavelength ran...

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Abstract

The invention discloses a dual-wavelength Fizeau laser interferometer standard reference mirror and relates to the field of optical lens design. The dual-wavelength Fizeau laser interferometer standard reference mirror comprises a diaphragm, a lens part and a reference face. An interferometer emits two beams of incident light of different wavelengths, and the caliber of the incident light and the caliber of the lens part are matched after the incident light passes through the diaphragm. The incident light converges to the sphere centre position of the reference face through the lens part. An existing commercial product only works on one wavelength, while, the dual-wavelength Fizeau laser interferometer standard reference mirror has two working wavelengths at the same time, the using requirements of Fizeau laser interferometers of different incident calibers of 4 inches to 12 inches can be met, and the detection ability of a single-wavelength standard reference mirror is extended.

Description

technical field [0001] The invention relates to the field of optical lens design, in particular to an optical structure design of a standard reference mirror of a dual-wavelength Fizeau laser interferometer. Background technique [0002] Fizeau laser interferometer is mainly used to measure the surface shape of components. It has the outstanding advantages of non-contact, non-damage and high precision. At present, it has become the first choice for optical component inspection. The standard reference mirror is an important part of the Fizeau laser interferometer, which converts the plane wave output by the Fizeau laser interferometer into a high-precision spherical wave for the surface shape measurement of spherical components. [0003] The principle of the Fizeau laser interferometer to measure the surface shape of the component is as follows: figure 1 shown. The standard reference mirror 1 converts the plane wave output by the Fizeau laser interferometer into a spherical...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02G01B11/24
Inventor 曲艺苏东奇彭石军苗二龙杨怀江
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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