Level-membrane piezoresistive ceramic pressure sensor

A pressure sensor, piezoresistive technology, applied in the field of flush membrane piezoresistive ceramic pressure sensor, can solve the problems of fragile alumina ceramics, achieve the effect of improving mechanical strength, good stability, and ensuring reliability

Active Publication Date: 2015-02-18
无锡盛赛传感科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In view of the fragile shortcomings of alumina ceramics, it is of great significance to develop piezoresistive ceramic pressure sensors with high overload performance

Method used

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  • Level-membrane piezoresistive ceramic pressure sensor
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  • Level-membrane piezoresistive ceramic pressure sensor

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Embodiment Construction

[0021] Figure 1 to Figure 3b As shown, it involves a flush membrane piezoresistive ceramic pressure sensor, including a ceramic ring 2, a ceramic elastic diaphragm 1 printed and sintered on the top of the ceramic ring 2 through glass glaze paste, and a ceramic elastic diaphragm 1 printed and sintered on the upper part of the ceramic ring 2 through conductive paste. The signal conditioning circuit 3 at the bottom of the ceramic ring 2; wherein, the ceramic elastic diaphragm 1 is evenly provided with four pads 11 connected to the four ceramic ring through holes 21 on the ceramic ring 2, and connected to the pads 11 There are four bridge resistors 10 constituting a Wheatstone bridge; a bridge trimming resistor 12 is respectively arranged between any two pads 11 and any two bridge resistors 10 .

[0022] Both the ceramic ring 2 and the ceramic elastic diaphragm 1 in this design can be designed in a square or circular structure, which can meet the needs of different occasions, red...

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Abstract

The invention discloses a level-membrane piezoresistive ceramic pressure sensor comprising a ceramic ring, a ceramic elastic membrane and a signal conditioning circuit. The ceramic elastic membrane is printed and sintered over the ceramic ring through glass glaze paste; the signal conditioning circuit is printed and sintered under the ceramic ring through conducting paste. Four pads connected with four through holes of the ceramic ring respectively are evenly disposed on the ceramic elastic membrane; four bridge resistors connected with the pads to form a Wheatstone bridge are also disposed on the ceramic elastic membrane; a bridge circuit trimming resistor is provided between any two of the pads and any tow of the bridge resistors. The ceramic elastic membrane is printed and sintered to the ceramic ring through the glass glaze paste, the problem that the ceramic elastic membrane easily breaks is solved, and reliability of the mechanical structure of the sensor is ensured; the signal conditioning circuit is printed and sintered to the ceramic ring through the conducting paste, so that the sensor is higher in overall precision and better in stability.

Description

technical field [0001] The invention relates to a flush membrane piezoresistive ceramic pressure sensor. Background technique [0002] In the traditional ceramic pressure sensor, the aluminum oxide ceramic diaphragm is generally used as the strained elastic body of the pressure sensor, and four thick film strain resistors are printed and sintered on its surface by a thick film process to form a Wheatstone bridge. . When the ceramic diaphragm produces a small amount of linear deformation under pressure (for example, the longitudinal deformation of a 0.3mm diaphragm at 10bar is 6-10μm from zero to full scale). Under the excitation voltage, the output terminal of the bridge circuit will produce a voltage output that is linearly related to the pressure. [0003] At present, there are two structures of ceramic elastomer carriers: Flush diaphragm ceramic pressure sensor and Integrated ceramic pressure sensor. [0004] The flush diaphragm ceramic pressure sensor consists of two ...

Claims

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Application Information

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IPC IPC(8): G01L1/18
Inventor 徐兴才徐雷严群丰
Owner 无锡盛赛传感科技有限公司
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