Marble high-precision movement platform

A motion platform and marble technology, applied in the direction of electrical components, circuits, semiconductor devices, etc., can solve the problem that the wafer thickness error cannot be well guaranteed, and achieve the effects of low stability, improved transmission stiffness, and improved positioning accuracy

Active Publication Date: 2015-02-18
SUZHOU DELPHI LASER +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Moreover, with the gradual mass production of 4-inch wafers and 6-inch wafers, the thickness error of the wafer itself cannot be well guaranteed.

Method used

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  • Marble high-precision movement platform
  • Marble high-precision movement platform
  • Marble high-precision movement platform

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0024] Such as figure 1 As shown, the marble high-precision motion platform includes X-axis motion platform, Y-axis motion platform and θ-axis motion platform. The X-axis motion platform includes X-axis marble base 1, X-axis linear guide rail 3, X-axis connecting plate 4 and control X The X-axis linear motor 2 for the axis connecting plate movement, the X-axis linear guide rail 3 and the X-axis linear motor 2 are installed on the X-axis marble base 1, the X-axis connecting plate 4 is placed on the X-axis linear guide rail 3, and the X-axis linear motor 2 Drive connection with the X-axis connecting plate 4, so as to control the movement of the X-axis connecting plate 4 along the X-axis linear guide rail 3;

[0025] The Y-axis motion platform includes a Y-axis marble base 5, a Y-axis linear guide rail 6, a Y-axis connecting plate 9, and a Y-axis linear motor 10 that controls the movement of the Y-axis connecting plate. The Y-axis linear guide rail 6 and the Y-axis linear motor 1...

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Abstract

The invention relates to a marble high-precision movement platform. An X-axis linear guide rail and an X-axis linear motor are arranged on an X-axis marble base, an X-axis connecting plate is arranged on the X-axis linear guide rail, the X-axis linear motor and the X-axis connecting plate are in driving connection, and the X-axis connecting plate is controlled to move along the X-axis linear guide rail. A Y-axis linear guide rail and a Y-axis linear motor are arranged on a Y-axis marble base, a Y-axis connecting plate is arranged on the Y-axis linear guide rail, the Y-axis linear motor and the Y-axis connecting plate are in driving connection, and the Y-axis connecting plate is controlled to move along the Y-axis linear guide rail. The Y-axis marble base is connected with the X-axis connecting plate, and an included angle of 90 degrees is formed between the Y-axis linear guide rail and the X-axis linear guide rail. A quartz carrying table is arranged on a rotary DD motor, and the rotary DD motor is arranged on the Y-axis connecting plate. Movement is quiet, noise is low, an X-axis platform and a Y-axis platform can be dismounted, matching is convenient, and the modular design requirement is met.

Description

technical field [0001] The invention relates to a marble high-precision motion platform. Background technique [0002] With the requirements of the LED cutting market for cutting depth control, especially for high-end LED chips, the cutting depth precision control of the laser inside the wafer will directly affect its IR and other issues. Moreover, with the gradual mass production of 4-inch wafers and 6-inch wafers, the thickness error of the wafer itself cannot be well guaranteed. The demand for X-Y motion platform with high-precision motion control arises at the historic moment. At present, there are already some high-precision X-Y motion platforms in the market, mainly manufactured in European and American countries. The price is generally above 300,000 RMB. The motion platform is the core component of LED equipment, and the pressure is too great for the cost control of the equipment. [0003] To sum up, the independent research and development of high-precision X-Y m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L33/00H01L21/78
CPCH01L21/784H01L33/005
Inventor 赵裕兴李军
Owner SUZHOU DELPHI LASER
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