A kind of miniature hemispherical amorphous alloy resonator and preparation method thereof

Abstract

The invention provides a minisize hemispherical amorphous alloy resonator and a preparation method thereof. The minisize hemispherical amorphous alloy resonator comprises a rectangular base, the center part of the base is a cylindrical cavity, and a hemispherical resonation body is disposed exactly above the cylindrical cavity and successively comprises a glass layer, a dispersive electrode layer, an insulating layer and an amorphous alloy layer from bottom to top; and the surrounding edges of the hemispherical resonation body are bonded into the upper surface of the base in a parallel way, and the edges of the hemispherical resonation body are provided with two layers of steps so as to draw out an electrode wire. Due to the fact that the surrounding edges of the hemispherical resonation body are bonded into the substrate, extremely good stability and impact resistance are provided, and the hemispherical resonation body contains an amorphous alloy material, so that excellent material characteristics are provided. The technological steps are concise, a common mature micro-mechanical processing method is employed, the disclosed minisize hemispherical amorphous alloy resonator has high symmetry, and thus the resonator reaches extremely high performances.

Description

technical field [0001] The invention relates to a solid wave mode matching gyroscope in the field of micro-electromechanical technology, in particular to a miniature hemispherical amorphous alloy resonator and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, workin...

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Problems solved by technology

This technology has the following disadvantages: the volume of the solid wave gyro cup-shaped resonator is too large, which limits its application in many conditions where the volume must be small; the piezoelectric electrodes of the cup-shaped vibrator chassis are bonded to the cup-shaped vibrator. There is a possibility of falling off under high-frequency vibration, and the reliability is not high; the processing technology of the gyroscope is relatively complicated, the processing cost is high, and it is not suitable for mass production; Large, the quality factor is difficult to improve; the gyro fixing method is unstable, and it is difficult to adapt to occasions that require high reliability

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