The invention provides a preparation method of an
electrode micro-
gyroscope. The preparation method comprises a first device groove forming step, a second device groove forming step, and a support post through hole forming step, wherein the second device groove forming step comprises a
mask layer forming step and a
resonator groove forming step; the first device groove forming step comprises an
electrode groove forming step, a
metal layer formation step and a surplus
metal removal step. The method provided by the invention is simple in steps, adopts a mature micro-mechanical
processing technology and an
etching method, and is beneficial to
mass production. A
nickel electrode side-driven hemispheric micro-
gyroscope has the advantages of high symmetry, relatively stable structure,
shock resistance and excellent performance. The
nickel electrode side-driven hemispheric micro-
gyroscope is driven by a side
driving mode, so that technological implementation is facilitated, the cost is relatively low, and
mass production is facilitated. The electrode micro-gyroscope has the advantages of small size, stable structure, sensitive response and the like, and has high symmetry, so that higher performance can be achieved.