A piezoelectrically driven multi-ring gyroscope with fixed inner and outer rings and its preparation method

Abstract

The invention provides an internal and external ring fixed piezoelectric-drive multi-ring gyroscope and a preparation method for the same. The gyroscope comprises a multi-ring resonator with 5 to 8 rings, a plurality of groups of spokes positioned between every two adjacent rings of the multi-ring resonator, a fixed sliding chute for supporting an external ring of the multi-ring resonator, a stepped cylindrical support rod for supporting an internal ring of the multi-ring resonator and discrete electrodes positioned on the upper surface of the multi-ring resonator, wherein an angular difference is formed between every two adjacent groups of spokes; the outermost ring of the multi-ring resonator is fixed, the innermost ring of the multi-ring resonator is fixed by the stepped cylindrical support rod, and only the middle rings can rotate freely. According to the gyroscope and the preparation method for the same, the internal and external rings of the multi-ring resonator are fixed, the electrodes are arranged on the upper surface of the multi-ring resonator, and the gyroscope has the advantages of small size, stable structure, sensitivity in response and the like, and has high symmetry, so that higher performance can be achieved.

Description

technical field [0001] The invention relates to a solid wave mode matching gyroscope in the field of micro-electromechanical technology, in particular to a piezoelectric-driven multi-ring gyroscope with fixed inner and outer rings and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environme...

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Problems solved by technology

[0005] This technology has the following disadvantages: the hemispherical resonant gyroscope is difficult to process because it involves spherical processing, and the process error is difficult to control; the cavity of the hemispherical resonator is obtained by etching, and the sphericity is not high enough, and the sphericity of the hemispherical resonator largely depends on the hemisphere The cavity of the resonator has a great influence on the performance of the gyro; the contact area between the hemispherical resonator and the support body of the gyro is small, and there is a possibility of fracture under high-frequency vibration, and the reliability is not high; the processing technology of the gyro is relatively complicated. High processing cost, not suitable for mass production

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