A kind of miniature blow molding hemispherical resonator gyroscope and its preparation method

Abstract

The invention provides a miniature blow-molding semispherical resonator gyroscope and a preparation method thereof. The resonator gyroscope comprises a rectangular base with the upper surface, wherein a cylindrical cavity is formed in the center of the base, a semispherical resonator body is arranged over the cylindrical cavity, the edge of the semispherical resonator body is connected to the upper surface of the base by bonding and is in the shape of a two-layer stair so that an electrode wire can be led out, and since the peripheral edge of the semispherical resonator body is connected to the base by bonding, very good stability and very good shock resisting capability are achieved. The technology steps are simple, a common mature micromachining process is adopted, and the resonator gyroscope has high symmetry, thereby being capable of achieving very high performance.

Description

technical field [0001] The invention relates to a solid wave mode matching gyroscope in the field of micro-electromechanical technology, in particular to a miniature blow-molded hemispherical resonator gyroscope and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, ...

AI Technical Summary

Problems solved by technology

[0005] The volume of the solid wave gyro cup-shaped resonator is too large, which limits its application in many conditions where the volume must be small; the piezoelectric electrode of the cup-shaped vibrator chassis is bonded to the cup-shaped vibrator, and it will fall off under high-frequency vibration Possibility, reliability is not high; the processing technology of the gyroscope is relatively complicated, the processing cost is high, and it is not suitable for mass production; the frequency split between the gyroscope driving mode and the detection mode is large, resulting in a large bandwidth of the gyroscope, and the quality factor is difficult Improvement; the gyro fixing method is unstable, and it is difficult to adapt to occasions that require high reliability

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