An outer edge fixed laser processing piezoelectric driven multi-ring gyroscope and its preparation method

A laser processing, piezoelectric drive technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, speed/acceleration/shock measurement, etc. Complex process and other problems, to achieve the effect of simple processing steps, reduced impact, and stable gyro structure

CN105043369BActive Publication Date: 2018-02-09SHANGHAI JIAO TONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2018-02-09

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Abstract

The invention provides an outer edge fixed type multi-ring gyroscope subjected to laser processing and piezoelectric actuation, and a preparation method thereof. The gyroscope comprises a multi-ring resonator containing 5-8 rings, a fixed chute for supporting the multi-ring resonator, multiple groups of spokes positioned between the two adjacent rings of the multi-ring resonator, and an electrode positioned on the upper surface of the multi-ring resonator, wherein the multiple groups of spokes are used for connecting the rings of the multi-ring resonator, and an angle difference is formed at the positions of the two adjacent groups of spokes; the outermost circle of the ring of the multi-ring resonator is fixed, and can vibrate freely only in the radial direction. The electrode is a piezoelectric material, and the gyroscope adopts the piezoelectric actuation mode when working. The gyroscope is fixed by the external edge of the multi-ring resonator, is arranged at the center of the rings in the electrode, has the advantages of small volume, stable structure, sensitive responding, and the like, and has good symmetry, thus achieving relatively high performance.
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Description

technical field

[0001] The invention relates to a solid wave mode matching gyroscope in the field of micro-electromechanical technology, in particular to an outer edge fixed piezoelectric-driven multi-ring gyroscope and a preparation method thereof. Background technique

[0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptabili...

Examples

Embodiment

[0053] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0054] Such as Figure 1A , 1B As shown, the present embodiment provides an outer edge fixed piezoelectric driven multi-ring gyroscope, including:

[0055] a multi-ring resonator1 containing five to eight rings;

[0056] A fixed chute 2 supporting the multi-ring resonator;

[0057] Four to seven groups of spokes 3 located between two adjacent rings of the multi-ring resonator are used to connect rings and rings of the multi-ring resonator, and the positions of adjacent two groups of spokes have ...