Ultraprecise friction driving mechanism

Abstract

The invention discloses an ultraprecise friction driving mechanism. The mechanism mainly comprises a driving part, an auxiliary support part, a pressing part and an eccentric pressing part, wherein stable and precise rotation positioning is provided by the driving part, a torque motor is directly connected with a friction driving shaft, a driving error caused by intermediate transmission links is reduced, a circular grating is connected to the other end of the driving shaft, and the angular precision of a driving wheel is measured; through the auxiliary support part, the deflection deformation of the tail end of a driven rod is reduced, the position precision of the driven rod is guaranteed, so as to achieve the effects of auxiliary support and fine-tuning positioning, wherein the displacement output by an eccentric wheel structure is converted into pressing force by a pressure reed, and a driving wheel system and a friction guide rod are pressed through a prepressing wheel system; through the eccentric pressing part, accurate displacement output can be provided for the pressure reed, the pressing force can be conveniently adjusted, and the change of the pressing force can be monitored in real time by a pressure sensor installed on an eccentric wheel driven component, so as to satisfy the controllable requirement on the pressing force.

Description

technical field [0001] The invention belongs to an ultra-precision driving system, and relates to a driving principle and mechanism, an ultra-precision friction driving mechanism with nanometer-level positioning accuracy. Background technique [0002] Ultra-precision driving mechanism is an indispensable and important part of high-precision instruments and equipment. At present, the main feed drive methods used in precision drive mechanisms include ball screw, static pressure screw, linear motor, friction drive, etc. Their mechanical structure characteristics directly affect the precision output characteristics and drive dynamics characteristics of the feed drive system. The main problem of the sliding screw is that there is a crawling phenomenon, there is a gap in the reverse movement, and the period error and the pitch error are difficult to correct. There are disadvantages such as reverse motion gap, period error and pitch error are difficult to correct, and the attenuat...

AI Technical Summary

Problems solved by technology

The main problem of the sliding screw is that there is a crawling phenomenon, there is a gap in the reverse movement, and the period error and the pitch error are difficult to correct. There are disadvantages such as reverse motion gap, period error and pitch error are difficult to correct, and the attenuation is not good; the static pressure screw has the disadvantages of small structural rigidity, easy to generate vibration, and many auxiliary equipment. Due to the strong magnetic field of the linear motor, the installation and adjustment , Inconvenient to disassemble, easy to absorb iron filings and other metal filings, serious heat generation, easy to generate vibration and other shortcomings

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