Correcting system and correcting method for semiconductor device

Abstract

The invention provides a correcting system and a correcting method for a semiconductor device. The correcting system comprises a memory device, a serial communication module, a digital signal processing and control circuit module and an analog signal processing circuit module, wherein the correcting data of the semiconductor device, obtained by a factory online product test, are saved in the memory device, the real-time running signal of the semiconductor device is converted into a digital control signal and sent to the digital signal processing and control circuit module by the analog signal processing circuit module, the corresponding correcting data saved in the memory device are automatically loaded to the analog signal processing circuit module by the digital signal processing and control circuit module through the serial communication module according to the digital control signal, and the correcting data are fed back to the semiconductor device by the analog signal processing circuit module so as to correct the semiconductor device in real time. Product parameter inconsistency caused by discrete manufacture process precision of a semiconductor technology is eliminated.

Description

technical field [0001] The invention relates to the field of integrated circuit manufacturing, in particular to a semiconductor device calibration system and calibration method. Background technique [0002] Micro-Electro-Mechanical System (MEMS) sensor is a new type of sensor manufactured by microelectronics and micromachining technology. Compared with traditional sensors, it has the characteristics of small size, light weight, low cost, low power consumption, high reliability, suitable for mass production, easy integration and intelligentization. At the same time, the feature size on the order of micron makes it possible to complete some functions that cannot be realized by traditional mechanical sensors. [0003] The semiconductor process has developed from submicron to deep submicron, and the precision has been continuously improved, but the discreteness of the process is still an unsolvable problem. The normal distribution curve is a probability distribution that is v...

AI Technical Summary

Problems solved by technology

The higher the process control accuracy, the more concentrated the data distribution, but there will still be deviations in some product performance parameters, which will affect the product yield

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