Cleaning device of polishing pad finishing disc
A technology for cleaning devices and dressing discs, which is applied to grinding/polishing equipment, abrasive surface adjustment devices, cleaning methods using tools, etc., can solve problems such as weak cleaning effect, to ensure the surface, avoid abnormal grinding rate, and maintain the process Stability and Product Safety Effects
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Example Embodiment
[0064] Example one
[0065] Cleaning device for polishing pad dressing disc, such as figure 2 , image 3 , Figure 4 , Figure 5 , Image 6 As shown, it includes a cleaning cup 7, a cleaning brush carrying device 5, a cleaning brush 8, a central nozzle 10, a first valve, a power pure water pipeline, a drive shaft, a bearing, a cylinder, a motor, and a controller;
[0066] The cleaning brush 8 is fixed on the top surface of the cleaning brush carrying device 5;
[0067] The upper end of the bearing is fixed at the middle of the bottom surface of the cleaning brush carrier device 5, and the lower end passes through the bottom of the cleaning cup 7 and is connected to the cylinder;
[0068] The air cylinder is used to drive the bearing to move up and down;
[0069] The drive shaft is provided with a through hole along the axis;
[0070] The drive shaft is pivotally fixed in the bearing, the upper end passes through the center of the cleaning brush carrier device 5 and is fixed with the cl...
Example Embodiment
[0077] Example two
[0078] The cleaning device for polishing pad dressing disk based on the first embodiment, further comprising an edge nozzle 2 and a second valve;
[0079] The edge nozzle 2 is arranged above the outer side of the cleaning cup 7 for spraying scattered water mist;
[0080] One end of the second valve is connected with the edge nozzle 2 and the other end is connected with a power pure water pipeline;
[0081] The controller is also used for controlling the action of the second valve according to the cleaning trigger signal and the cleaning end signal.
[0082] The deionized water sprayed by the edge nozzle 2 can clean the side of the polishing pad dressing disc.
Example Embodiment
[0083] Example three
[0084] Based on the cleaning device of the polishing pad dressing disc of the second embodiment, the side wall of the cleaning cup 7 is provided with an overflow hole; the bottom of the cleaning cup 7 is provided with a drain valve 6;
[0085] The drain valve 6 has an upper end connected to the inside of the cleaning cup 7 and a lower end connected to the outside of the cleaning cup 7;
[0086] The controller is also used to control the action of the drain valve 6 according to the cleaning trigger signal and the cleaning end signal.
[0087] In the cleaning device of the polishing pad dressing disc of the third embodiment, the setting of the overflow hole can limit the height of the liquid level in the cleaning cup, and the setting of the drain valve can empty the liquid in the cleaning cup.
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