Technique and equipment for preparing high-temperature super-conduction strip materials by virtue of laser chemical vapor deposition method

Abstract

The invention relates to a technique and equipment for rapidly and continuously preparing second-generation high-temperature super-conduction strip materials by virtue of a liquid injection atomization-multielement eutectoid laser chemical vapor deposition method. According to a liquid raw material supply system of the equipment, the problems that accurate, stable and continuous raw material steam cannot be supplied for a long time by virtue of a traditional chemical vapor deposition method, and components of a thin film cannot be accurately controlled in a preparation process of a multielement thin film are solved. Based on the liquid raw material supply system of the equipment, by illuminating the surface of a substrate by virtue of laser, the reaction activation energy among molecules of a gas phase raw material is substantially reduced, and the speed of the chemical reaction is increased. By virtue of a compound roller transmission system of the equipment, long flexible substrate strip materials can be gradually transported to a deposition region of a heating table, so as to rapidly and continuously prepare second-generation high-temperature super-conduction strip material products.

Description

1. Technical Field: [0001] The present invention is a technology and equipment for high-speed and continuous preparation of second-generation high-temperature superconducting tapes by using a liquid spray atomization-multiple eutectoid laser chemical vapor deposition method, and relates to a second-generation high-temperature superconducting film with high electrical properties and The high-speed and continuous preparation technology of the buffer layer film belongs to the technical field of superconducting materials. 2. Background technology: [0002] A material whose resistance is completely zero at low temperatures is called a superconducting material, and it is considered one of the greatest discoveries of the 20th century. Superconducting technology is an important direction of high-tech development in this century. It has important practical significance and huge development prospects in high-tech fields such as energy, transportation, industry, medical treatment, biology,...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a technology and equipment for high-speed and continuous preparation of second-generation high-temperature superconducting strips using liquid spray atomization-multiple eutectoid laser chemical vapor deposition, so as to solve the problem of large-scale preparation of conventional chemical vapor deposition. Difficulties Existing in the Second Generation High Temperature Superconducting Tape Products

[0006] Aiming at the problems of slow deposition rate and low production efficiency of the conventional chemical vapor deposition method, the solution of the patent of the present invention is: by introducing the laser into the reaction chamber to irradiate the surface of the substrate, the reaction activation energy between the raw material molecules is greatly reduced , so the second-generation high-temperature superconductor and its buffer layer film can be prepared at a very high rate

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