Technology and equipment for preparing high-temperature superconducting strips by laser chemical vapor deposition

Abstract

The invention relates to a technique and equipment for rapidly and continuously preparing second-generation high-temperature super-conduction strip materials by virtue of a liquid injection atomization-multielement eutectoid laser chemical vapor deposition method. According to a liquid raw material supply system of the equipment, the problems that accurate, stable and continuous raw material steam cannot be supplied for a long time by virtue of a traditional chemical vapor deposition method, and components of a thin film cannot be accurately controlled in a preparation process of a multielement thin film are solved. Based on the liquid raw material supply system of the equipment, by illuminating the surface of a substrate by virtue of laser, the reaction activation energy among molecules of a gas phase raw material is substantially reduced, and the speed of the chemical reaction is increased. By virtue of a compound roller transmission system of the equipment, long flexible substrate strip materials can be gradually transported to a deposition region of a heating table, so as to rapidly and continuously prepare second-generation high-temperature super-conduction strip material products.

Description

1. Technical field: [0001] The invention is a technology and equipment for high-speed and continuous preparation of second-generation high-temperature superconducting strips using liquid spray atomization-multivariate eutectoid laser chemical vapor deposition, and relates to second-generation high-temperature superconducting thin films with high electrical properties and The high-speed and continuous preparation technology of the buffer layer thin film belongs to the technical field of superconducting materials. 2. Background technology: [0002] Materials whose electrical resistance is completely zero at low temperatures are called superconducting materials, and it is considered one of the greatest discoveries of the 20th century. Superconducting technology is an important direction of high-tech development in this century. It has important practical significance and great development prospects in high-tech fields such as energy, transportation, industry, medical treatment...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a technology and equipment for high-speed and continuous preparation of second-generation high-temperature superconducting strips using liquid spray atomization-multiple eutectoid laser chemical vapor deposition, so as to solve the problem of large-scale preparation of conventional chemical vapor deposition. Difficulties Existing in the Second Generation High Temperature Superconducting Tape Products

[0006] Aiming at the problems of slow deposition rate and low production efficiency of the conventional chemical vapor deposition method, the solution of the patent of the present invention is: by introducing the laser into the reaction chamber to irradiate the surface of the substrate, the reaction activation energy between the raw material molecules is greatly reduced , so the second-generation high-temperature superconductor and its buffer layer film can be prepared at a very high rate

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