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Three-axis accelerometer

A technology of axial acceleration and accelerometer, which is applied in the direction of measuring acceleration, multi-dimensional acceleration measurement, speed/acceleration/impact measurement, etc., can solve the problem that the sensitivity cannot meet the demand, achieve high sensitivity, increase the vertical distance, and improve the effect of sensitivity

Active Publication Date: 2015-03-25
QST CORP
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  • Claims
  • Application Information

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Problems solved by technology

However, the sensitivity of the current capacitive three-axis accelerometer can not meet the demand

Method used

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  • Three-axis accelerometer

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Embodiment Construction

[0012] The specific implementation of the triaxial accelerometer provided by the present invention will be described in detail below in conjunction with the accompanying drawings.

[0013] figure 1 Shown is a top view of a first embodiment of the accelerometer of the present invention. see figure 1 As shown, the accelerometer 100 includes a substrate 1 , a detection mass 2 , a support base 3 and at least one first comb-shaped capacitor group 4 .

[0014] The support base 3 is fixed on the substrate 1. In this specific embodiment, the support base 3 is fixed on the substrate 1 in a one-point fixed manner. In another specific embodiment of the present invention, the The supporting base 3 is fixed on the base plate 1 by means of multi-point fixing.

[0015] The proof mass 2 is suspended on the surface of the supporting base 3 in an asymmetric manner through an opposite elastic piece 21 . The elastic piece 21 can be realized by using structures such as cantilever type, spiral ...

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Abstract

The invention provides a three-axis accelerometer, comprising a substrate, a mass detection block, a support base, and at least a first comb-shaped capacitor group. The support base is fixed on the substrate. The mass detection block is suspended on the surface of the support base in an asymmetrical manner through springs which are arranged oppositely. The substrate is provided with at least two electrodes which are opposite to each other. The electrodes are respectively corresponding to the side of the mass detection block where the mass is relatively large and the side where mass is relatively low. The electrodes are used to form a capacitor with the mass detection block. The first comb-shaped capacitor group is disposed between the line where the springs are in and the electrodes. When the accelerometer has acceleration speed parallel to the first direction of the substrate plane, the capacitance of the first comb-shaped capacitor group changes. The accelerometer is advantaged in that the first comb-shaped capacitor group is disposed between the line where the springs are in and the electrodes, so the vertical distance from the electrode to the line where the springs are in is increased, thereby improving sensitivity of the three-axis accelerometer on a direction of vertical to the substrate plane, so that a high sensitive accelerometer is provided.

Description

technical field [0001] The invention relates to the field of accelerometers, in particular to a high-sensitivity three-axis accelerometer. Background technique [0002] There is a mass inside the capacitive three-axis accelerometer, which is a standard plate capacitor from a single unit point of view. The change of acceleration drives the movement of the movable mass, thereby changing the distance between the two poles of the plate capacitor and the facing area, and the acceleration is calculated by measuring the change in capacitance. Capacitive three-axis accelerometer has the advantages of high sensitivity, low power consumption, good temperature characteristics, and can work in force balance closed-loop mode, so it has been widely researched and applied. However, the sensitivity of the current capacitive triaxial accelerometer cannot meet the demand. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a three-a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125G01P15/18
Inventor 裘进
Owner QST CORP
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