Displacement damage dosage detection method based on p-i-n structure

Abstract

The invention relates to a displacement damage dosage detection method based on a p-i-n structure. The method comprises the steps that a probe of the p-i-n structure is screened, detector parameters are adjusted and determined, and the detector response is obtained and calibrated under different radioactive sources; according to non-ionizing energy loss (NIEL) of different radioactive sources for probe materials, the detector response and the fluence or dosage relation of different radioactive sources are unified into the relation between the detector response and displacement damage dosage; according to the actual detection result, a damage enhancement factor is determined. The displacement damage dosage detection method has the advantages that the detected physical quantity is displacement damage dosage and comprises any particle capable of causing the displacement damage effect; compared with detection particle species and energy spectra, the displacement damage degree of a semiconductor element can be directly reflected; a detector based on the structure is portable, flexible, easy to use and applicable to space environment monitoring, semiconductor element displacement damage effect estimation and service life prediction.

Description

technical field [0001] The invention relates to a radiation environment detection method, in particular to a displacement damage dose detection method based on a p-i-n structure, which belongs to radiation effect evaluation technology, radiation field detection technology and microelectronics technology. Background technique [0002] The space radiation environment includes galactic cosmic rays, solar activity events and the earth's capture zone, which cause space radiation effects on components, and the displacement damage effect is one of them. Currently, models describing the space radiation environment include the galactic cosmic ray model, the AP-8, AE-8 model, and the solar proton model published by NASA and others, which give the elemental abundances of high-energy particles and The flux, the energy and spatial distribution of protons and electrons in the Earth's capture belt, and the disturbances caused by periodic solar events. [0003] Since the displacement damag...

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Problems solved by technology

[0005] However, ground irradiation devices such as protons, electrons, heavy

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