Self-tuning all-solid-state microwave source MPT, self-tuning device and control method

[0033] Example 1:

[0034] like figure 1 An all-solid-state microwave source MPT self-tuning device is shown, wherein the microwave plasma torch (4) includes a coupling antenna (5) and an adjusting member (6), characterized in that the device includes an all-solid-state microwave source (1) , control module (2), transmission device (3);

[0035] The all-solid-state microwave source is connected to the coupling antenna (5), the adjustment member (6) is connected to the transmission device (3), and the transmission device (3) is connected to the control module (2), the control module (2) is connected to the all-solid-state microwave source;

[0036] The all-solid-state microwave source generates a microwave electromagnetic field to provide microwave energy for the microwave plasma torch (4), and at the same time obtains feedback information of the microwave plasma torch (4) from the coupling antenna (5), and the all-solid-state microwave source stores the feedback information in the feedback information. The reflected power value is extracted and fed back to the control module (2), the control module sends a control signal to the transmission device (3) according to the reflected power value and the preset parameter relationship curve, and the transmission device (3) The control signal drives the adjusting member (6) to move.

[0037] In this embodiment, the all-solid-state microwave source is used to provide microwave energy for the microwave plasma torch (4), and to extract the reflected power value in the feedback information of the microwave plasma torch (4), and feed it back to the control module (2). The control module (2) is used for controlling the position of the adjusting member (6) through the transmission device (3). The adjusting member (6) is used for adjusting the position of the reflecting end surface (7). like figure 1 As shown, the distance from the reflection end face (7) along the outer tube (16) to the coupling antenna (5) is the reflection end face distance L 1 , by pairing L 1 The control of the microwave plasma torch (4) can be realized.

[0038] The all-solid state described in this embodiment is used to provide microwave energy for the microwave plasma torch (4), and to obtain feedback information from the coupling antenna (5), extract the reflected power value in the feedback information, and feed it back to the control module (2) . After analyzing and judging by the control module (2), the transmission device (3) is controlled to work, and the transmission device (3) drives the adjustment member (6) along the figure 1 The outer tube (16) shown in moves. The tuning of the microwave plasma torch is realized by controlling the moving speed and position of the adjusting member (6).

[0039] The transmission device (3) in this embodiment includes a motor and a linkage device, the motor is respectively connected with the control module (2) and the linkage device, and the linkage device is connected with the adjustment member. The motor is used to rotate according to the control signal output by the control module (2), and drives the adjusting member (6) to move through the linkage device.

[0040] The control module (2) of the present invention may be a computer or a single-chip microcomputer, as long as it can satisfy the comparison and judgment function required by the present invention, and is not limited to this embodiment.

[0041] The linkage device of the present invention can adopt the structure of guide rail, gear transmission (worm gear structure, bevel gear structure, etc.), pulley and other structures, as long as it can meet the mechanical transmission function required by the present invention, it is not limited to this embodiment.

[0042] In this embodiment, the control module (2) adopts a computer, and the transmission device (3) adopts gear transmission.

[0043] The all-solid-state microwave source in this embodiment serves as a power source to provide microwave energy for the microwave plasma torch (4), and also obtains feedback information from the microwave plasma torch (4) while supplying energy, and the feedback information includes reflected power value, the value of the reflected power and the distance L from the reflecting end face 1 relationship such as figure 2 shown. The all-solid-state microwave source has the function of extracting the reflected power value, and feeds the extracted reflected power value to the computer. The computer makes an analysis and judgment according to the reflected power value, and sends an action electrical signal to the motor. The mechanical linkage adjusting member (6) moves up and down along the outer tube (16). The adjustment piece (6) moves to cause the reflection end face distance L 1 The feedback information also changes, and the computer controls the working state of the microwave plasma torch (4) in real time according to the received feedback information, so as to realize the self-tuning of the microwave plasma torch.

[0044]This embodiment also provides a self-tunable all-solid-state microwave source MPT including the above-mentioned all-solid-state microwave source MPT self-tuning device and the plasma torch (4). The self-tuning function of the all-solid-state microwave source MPT is realized by the all-solid-state microwave source MPT self-tuning device.

[0045] Example 2:

[0046] Based on the all-solid-state microwave source MPT self-tuning device described in Embodiment 1, this embodiment provides a image 3 The shown all-solid-state microwave source MPT self-tuning control method. The all-solid-state microwave source MPT self-tuning control method described in this embodiment is a heuristic method.

[0047] The all-solid-state microwave source MPT self-tuning control method is used in the above-mentioned self-tunable all-solid-state microwave source MPT. The self-tuning control method in the control module (2) includes the following steps:

[0048] S1: Set the threshold of reflected power coefficient;

[0049] S2: read the real-time reflected power as the first reflected power value, and obtain the first reflected power coefficient from the real-time reflected power value;

[0050] S3: determine whether the first reflected power coefficient is greater than the threshold, if yes, go to step S4, if not, go back to step S2;

[0051] S4: Send a control signal to increase the distance between the reflection end faces;

[0052] S5: Read the real-time reflected power as the second reflected power value, and determine whether the second reflected power value is greater than the first reflected power value. If yes, send a control signal to reduce the distance between the reflecting end faces and return to step S2; otherwise, return to step S2 .

[0053] Or the self-tuning control method in the control module (2) includes the following steps:

[0054] S1: Set the threshold of reflected power coefficient;

[0055] S2: read the real-time reflected power as the first reflected power value, and obtain the first reflected power coefficient from the real-time reflected power value;

[0056] S3: determine whether the first reflected power coefficient is greater than the threshold, if yes, go to step S4, if not, go back to step S2;

[0057] S4: Send a control signal to reduce the distance between the reflection end faces;

[0058] S5: Read the real-time reflected power as the second reflected power value, and determine whether the second reflected power value is greater than the first reflected power value. If yes, send a control signal to increase the distance between the reflecting end faces and return to step S2, otherwise, return to step S2 .

[0059] Specifically, first start the instrument and software, and set the reflected power coefficient threshold in the computer software, taking 10% as an example, such as figure 2 shown in. The plasma is ignited by the ignition device, and the reflected power value at this time is read by computer software, and the average value of multiple values ​​is taken. Compare the calculated reflected power coefficient with the threshold value of 10% to determine whether it exceeds the threshold range. If the reflected power coefficient is lower than 10%, it is not necessary to adjust the torch and continue to read the reflected power value. If the reflected power coefficient exceeds 10%, the position of the reflection end face of the torch needs to be adjusted by the transmission device to reduce the reflected power. Take 20% as an example, such as figure 2 As shown in , there are 4 intersection points with the fitting curve in the adjustment range of the reflection end face in the range of 0-120mm, so the distance between the reflection end face at this time and the adjustment direction of the reflection end face cannot be judged. In this method, the reflective end face is first adjusted to increase L 1 At the same time, read the reflected power and judge whether it decreases. If the value decreases, you do not need to adjust the torch, and continue to read the reflected power value. If its value increases, adjust in the opposite direction to reduce the distance of the reflection end face, and then continue to read the reflected power value, and so on. It should be noted that the initial adjustment direction is not limited in this method.

[0060] The step of reading the real-time reflected power is specifically: reading the reflected power for a preset number of times and then taking an average value as the real-time reflected power. The control method used in this embodiment does not need to obtain the reflected power value and the distance L of the reflecting end face in advance 1 The relationship can avoid the fixed setting of the control program according to the relationship curve, and improve the anti-interference of the control device.