Stokes polarization meter error calibration and compensation method based on wave plate rotating method

Abstract

The invention provides a Stokes polarization meter error calibration and compensation method based on a wave plate rotating method. The Stokes polarization meter error calibration and compensation method includes the specific steps that horizontal line polarization light generated by a PSG is used as standard reference light; the standard reference light is measured through a to-be-calibrated Stokes polarization meter N times to obtain N light intensity values; Fourier analysis is carried out on the obtained N light intensity values to obtain corresponding Fourier coefficients; the fast axis azimuth angle error and the phase delay amount error of a quarter-wave plate are calculated through the relation between device parameter errors and the Fourier coefficients according to the Fourier coefficients; error compensation is carried out on the Stokes polarization meter through the relation between Stokes parameters and the parameter errors according to the two parameter errors of the quarter-wave plate. The Stokes polarization meter error calibration and compensation method is easy to operate, high in feasibility and high in calibration accuracy.

Description

Technical field [0001] The invention belongs to the technical field of polarization measurement, and specifically relates to an error calibration and compensation method for a Stokes polarimeter based on a rotating wave plate method. Background technique [0002] Stokes parameter (Stokes vector) is a characterization method to describe the polarization state of a beam. The Stokes polarimeter can accurately measure the Stokes parameters of the incident beam, and has been widely used in high-resolution lithography, biomedicine, and remote remote sensing. In the lithography system, the polarization detection technology based on the light modulation method is the most widely used, which can accurately measure the polarization state distribution of the illumination beam and the imaging beam, and the polarization aberration of the projection objective lens. The rotating wave plate method is based on the light modulation method to measure the Stokes parameter of the incident beam. The...

AI Technical Summary

Problems solved by technology

Both of the above two methods need to use the polarization state generator PSG (Polarization State Generator) to generate no less than 4 kinds of linearly independent standard reference lights, and at least 4 measurements are required for each reference polarized light. The calibration process is complicated, and only The instrument matrix of the Stokes polarimeter can be calculated, but the size of each error source cannot be calculated

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