A kind of copper indium gallium selenide thin film and preparation method thereof
A technology of copper indium gallium selenide and thin film, which is applied in the field of copper indium gallium selenide thin film and its preparation, can solve the problems of restricting large-scale application and production, and achieve the effect of easy to realize large area deposition, controllable composition and high efficiency
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Embodiment 1
[0036] Cu (copper) with a thickness of 50 nm is plated on a Mo (molybdenum) glass substrate by using a sputtering process. When the solute composition is 0.15mol / L Cu(NO 3 ) 2 , 0.30mol / L InCl 3 , 0.5mol / L GaCl 3 , 0.30mol / L H 2 SeO 3 , 1mol / L Potassium chloride, in the 500ml aqueous solution of 1mol / L trisodium citrate, its pH is adjusted to 0.3 with dilute hydrochloric acid, forms the required electrolytic solution system of step S2; With Cu-plated Mo glass as working electrode, The large-area Pt mesh is the counter electrode, and the saturated calomel electrode (SCE) is the reference electrode; set the potential of the working electrode to 0.5V (between the SCE and the SCE), the temperature of the electrolyte system is 80°C, and the working electrode is the copper-plated molybdenum substrate Electrochemical deposition (deposition time 10 minutes) of copper-depleted copper, indium, gallium, and selenium was carried out, and then the deposited molybdenum substrate was pl...
Embodiment 2
[0039] In this embodiment, a Cu layer with a thickness of 105 nm is plated on the Mo glass substrate by using an electrochemical deposition process. The solute composition is 0.02mol / L CuSO 4 , 0.04mol / L In 2 (SO 4 ) 3 , 0.1mol / L Ga 2 (SO 4 ) 3 , 0.04mol / L SeO 2 , in the 500ml dimethyl sulfoxide (DMSO) of 1mol / L sodium sulfate and water mixed system, its pH is adjusted to 13 with sodium hydroxide, forms the required electrolytic solution system of step S2; With Cu-plated Mo glass as The working electrode, the large-area Pt mesh as the counter electrode, and the saturated calomel electrode (SCE) connected to the double-salt bridge system as the reference electrode. Adjust the potential of the working electrode to -2.5V (with SCE), and the temperature of the electrolyte system is 80°C. Electrochemical deposition (deposition time 90 minutes) of copper-poor copper, indium, gallium, and selenium is carried out on the substrate of the working electrode, and then the depositio...
Embodiment 3
[0041] Dimethylformamide (DMF) was used to replace dimethyl sulfoxide (DMSO) and water in Example 2, and other process parameters were the same as in Example 2. Finally, a copper-poor copper indium gallium selenide semiconductor thin film material can be prepared. Observation of film morphology by SEM (scanning electron microscope), it is found that the CIGS film crystal particles prepared in this embodiment are such as figure 1 The crystalline grains of the films shown are large.
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