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Liquid quantitative supply device

A quantitative supply and liquid technology, which is applied in the direction of liquid distribution, transportation or transfer devices, distribution devices, special distribution devices, etc., can solve the problems of affecting the process effect, generating bubbles, liquid waste, etc., to reduce labor load and low production cost , The effect of simple device structure

Active Publication Date: 2015-04-29
SHENYANG KINGSEMI CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Part of the gas will be dissolved in the liquid pressed out of the sealed barrel by using compressed gas, and bubbles will be generated during the process, which will affect the process effect
In addition, it is difficult to control the liquid flow rate supplied each time in this way, which will cause liquid waste in the process

Method used

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  • Liquid quantitative supply device

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Embodiment Construction

[0015] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0016] Such as figure 1 As shown, the present invention includes a gas pressure regulating device 1, a liquid supplement barrel 9, a liquid supply tank 10, a nozzle connecting pipe 7, a gas source and a control system, wherein the liquid supplement barrel 9 is connected to the gas source and supply through the gas pipeline and the liquid supplement pipeline. The liquid tank 10 is connected, the liquid supplement valve 4 is provided on the liquid supplement pipeline, and the nozzle connecting pipe 7 is located below the liquid supply tank 10 and is connected to the liquid supply tank 10 through the liquid supply pipeline. A liquid medicine valve 6 is provided on the road, and both the liquid replenishment medicine valve 4 and the liquid medicine valve 6 are connected to the control system. The gas pipeline is provided with a gas pressure adjusting device 1, and ...

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Abstract

The invention belongs to the technical field of wafer gluing-development crafts, particularly provides a liquid quantitative supply device. The liquid quantitative supply device comprises a liquid supplement bucket, a liquid supply tank, a nozzle connecting pipe, a gas source and a control system, wherein the liquid supplement bucket is connected with the gas source and the liquid supply tank through a gas pipeline and a liquid supplement pipeline respectively; a liquid supplement medical liquid valve is arranged on the liquid supplement pipeline; the nozzle connecting pipe is positioned below the liquid supply tank, and communicated with the liquid supply tank through a liquid supply pipeline; a liquid supply medical liquid valve is arranged on the liquid supply pipeline; both the liquid supplement medical liquid valve and the liquid supply medical liquid valve are connected with the control system; the control system enables the distance between the work position of the liquid level in the liquid supply tank and the nozzle connecting pipe to be constant through the liquid supplement medical liquid valve and the liquid supply medical liquid valve, so that a liquid can be quantitatively supplied under constant pressure. The liquid quantitative supply device has the advantages that pressure generated from the self weight of the liquid is used for the liquid supply; as both the liquid supplement medical liquid valve and the liquid supply medical liquid valve are connected with the control system, automatic liquid supplement and quantitative supply can be realized; bubbles can be removed from the liquid during the liquid supply process.

Description

Technical field [0001] The invention belongs to the technical field of wafer coating and development technology, in particular to a liquid quantitative supply device. A protective film is formed on the semiconductor wafer or its coating and a quantitative liquid medicine is provided in the development process after the wafer is exposed. Background technique [0002] At present, in the process of forming a protective film on a semiconductor wafer or its coating and in the development process after the wafer is exposed, the known liquid supply device mainly adopts a method of pumping or pressing compressed gas from a sealed barrel. A part of the gas will be dissolved in the liquid pressed out from the sealed barrel by compressed gas, and bubbles will be generated during the process, which will affect the process effect. In addition, it is difficult to control the flow of liquid supplied each time in this way, which will cause liquid waste in the process. Summary of the invention ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B67D7/02B67D7/78B67D7/30B67D7/76
Inventor 卢继奎胡延兵
Owner SHENYANG KINGSEMI CO LTD
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