Planning method for crown block route facing transportation system of semiconductor production line

A handling system and route planning technology, which is applied in navigation, surveying and navigation, navigation calculation tools, etc., can solve problems such as not meeting optimal handling requirements, improve route search efficiency, simplify dynamics, and improve crane transportation efficiency effect

Inactive Publication Date: 2015-04-29
SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

In the handling system used in common semiconductor production lines, the movement route of the crane is not the shortest route, which cannot meet the optimal handling requirements

Method used

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  • Planning method for crown block route facing transportation system of semiconductor production line
  • Planning method for crown block route facing transportation system of semiconductor production line
  • Planning method for crown block route facing transportation system of semiconductor production line

Examples

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Embodiment Construction

[0022] The present invention will be further described in detail below in conjunction with the examples.

[0023] The present invention is a method for planning a crane route for a semiconductor production line handling system, which is essentially a search algorithm, including: setting key points on the laid track and recording coordinates, assuming that the two directions are fully connected at the turnout; splitting the track data , build a directed graph with key points and the track between two points; find the route from the starting point according to the direction of the directed graph and calculate the distance to the target point with the coordinates of the key points to find the shortest route. In the route search process, the influence of multiple cranes is not considered, and only one crane is assumed to exist on the entire map, and the purpose is to find the shortest route. The found route information is a reference for multi-day vehicle coordination. Specifical...

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Abstract

The invention relates to a planning method for a crown block route facing a transportation system of a semiconductor production line. The planning method comprises the following steps: arranging key points of a paved rail and recording coordinates; assuming a turnout part to be completely communicated in two directions; splitting rail data, and constructing a directed graph by adopting the key points and the rail between the two points; and finding the route from a starting point according to the direction of the directed graph, calculating the distance between the starting point and a target point by adopting the coordinates of the key points, and finding out the shortest route. The planning for the crown block route facing the transportation system of the semiconductor production line can be used for dealing with complicated conditions of the rail; and the shortest route from the transportation starting point to a destination is rapidly found out and the operation efficiency of a crown block is improved.

Description

technical field [0001] The invention relates to a path planning algorithm for a crane, in particular to a route planning method for a crane for a semiconductor production line handling system. Background technique [0002] In modern semiconductor production lines, with the improvement of production automation level, automatic handling system is more and more widely used. Since the processing equipment and wafer box storage equipment in the semiconductor production line are distributed in various locations in the factory area, the track route of the handling system is complicated. How to quickly and effectively handle processing materials can improve the production efficiency of enterprises. In the handling system used in common semiconductor production lines, the movement route of the crane is not the shortest route, which cannot meet the optimal handling requirements. Contents of the invention [0003] In view of the above-mentioned technical deficiencies, the object of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C21/00
CPCG01C21/00G01C21/20
Inventor 徐皑冬刘明哲王晨曦金妮
Owner SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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