Method and device for interception sampling type helium mass spectrometer leak detection

Abstract

The invention discloses a method and a device for interception sampling type helium mass spectrometer leak detection. The method includes: putting a detected product in a vacuum hermetic chamber; filling helium into the detected product; vacuumizing the vacuum hermetic chamber; collecting vacuumizing gas in the vacuum hermetic chamber; removing the detected product out of the vacuum hermetic chamber; adopting a helium mass spectrometer leak detector for helium mass spectrometer leak detection of the acquired vacuumizing gas. A first shutoff valve and a second shutoff valve are mounted on a vacuumizing pipeline to form an interception section on the vacuumizing pipeline between the first shutoff valve and the second shutoff valve, when the vacuum hermetic chamber reaches a detection vacuum degree, the vacuumizing gas in the vacuum hermetic chamber is intercepted and collected in the interception section by closing the first shutoff valve and the second shutoff valve, and the sampled vacuumizing gas is subjected to leak detection after the detected product is taken away. Since the detected product is separated from a detection system during leak detection, production efficiency is improved, and high-speed online detection on a production line is realized.

Description

Technical field [0001] The invention relates to the technical field of helium mass spectrometry leak detection, in particular to a method and device for helium mass spectrometry leak detection by intercepting sampling. Background technique [0002] With the development of science and technology, the requirements for vacuum leak detection technology are getting higher and higher. At present, the most widely used and most accurate vacuum leak detection method at home and abroad is the helium mass spectrometry leak detection method. [0003] The helium mass spectrometry leak detection method uses the helium partial pressure measurement principle of the helium mass spectrometer leak detector to realize the helium leakage measurement of the tested product. When there is a leak on the sealing surface of the tested product, the leaking gas helium and other components will leak out from the leak. After the leaked gas enters the helium mass spectrometer leak detector, due to the helium mass...

AI Technical Summary

Problems solved by technology

[0005] However, this vacuum box leak detection method needs to suspend the production line of the inspected product, and then restart the production line of the inspected product after the helium mass spectrometer leak detector completes the detection, so that the production system and the detection system interfere with each other, reducing the production cost of the product. High production efficiency, not suitable for automatic high-speed leak detection of actual production lines

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