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Display baseplate, display panel and display device

A technology for display substrates and alignment marks, which is applied in the fields of display substrates, display panels and display devices, and can solve the problems of exposure equipment alignment and inability to focus, and achieve the effects of excellent preparation quality, high quality, and uniform gray scale

Inactive Publication Date: 2015-04-29
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The display substrate prevents the surface of the alignment mark from showing a "back" state after the photoresist is coated, and makes the surface of the alignment mark flat after the photoresist is coated, so that the alignment mark is flat after the photoresist is coated. The surface gray level is uniform and the boundary is clear, which solves the problem that the exposure equipment cannot focus on the alignment, realizes the automatic alignment and exposure of the exposure equipment, and improves the production efficiency

Method used

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  • Display baseplate, display panel and display device
  • Display baseplate, display panel and display device
  • Display baseplate, display panel and display device

Examples

Experimental program
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Effect test

Embodiment 1

[0029] This embodiment provides a display substrate, such as image 3 and Figure 4 As shown, the alignment mark 1 is included, and the alignment mark 1 is used to align the exposure equipment when exposing and forming the pattern of the first film layer on the display substrate. The thickness of the middle area 11 of the alignment mark 1 is smaller than its edge area 12, so that the thickness of the alignment mark 1 after coating the photoresist 2 is uniform.

[0030] It should be noted that the edge area 12 surrounds the periphery of the middle area 11 . The boundary division between the middle area 11 and the edge area 12 of the alignment mark 1 is divided according to the thickness distribution of the photoresist coated on the alignment mark 1 with a flat surface in the prior art, that is, the corresponding photoresist 2 The area with a thicker distribution is defined as the middle area 11, and the area with a thinner distribution of the photoresist 2 corresponding to th...

Embodiment 2

[0038] This embodiment provides a display substrate, which is different from Embodiment 1 in that Figure 5As shown, the thickness of the middle area 11 of the alignment mark 1 is uniform, and the thickness of the edge area 12 of the alignment mark 1 is uniform.

[0039] Since the alignment mark 1 on the display substrate is usually designed very small (this is mainly to make the alignment mark 1 not occupy too much area on the display substrate), the middle area 11 and the edge area of ​​the alignment mark 1 The area of ​​12 is correspondingly very small, and the above arrangement of the alignment mark 1 can fully realize the uniform thickness of the alignment mark 1 after being coated with photoresist. Therefore in the present embodiment, the above-mentioned setting of alignment mark 1 can also make the surface after alignment mark 1 is coated with photoresist completely flat, so that the surface gray scale of alignment mark 1 after coating photoresist is uniform, and the li...

Embodiment 3

[0042] This embodiment provides a display substrate, which is different from Embodiment 1-2 in that the display substrate is an array substrate, and the alignment marks are made of metal materials or insulating materials. The first film layer includes a pixel electrode layer, a gate metal layer, a source-drain metal layer, an active layer or a common electrode layer.

[0043] In this embodiment, the metal material used in the alignment mark can be the metal material used in any one of the pixel electrode layer, gate metal layer, source-drain metal layer or common electrode layer. Of course, the alignment mark can also use material that forms the active layer. In addition, the alignment mark can also be made of the same material as that of any insulating layer (such as a gate insulating layer or a passivation layer) in the array substrate. With such an arrangement, the alignment mark and a certain film layer on the array substrate can be prepared and formed at the same time th...

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Abstract

The invention provides a display baseplate, a display panel and a display device. The display baseplate comprises an alignment mark, and the alignment mark is used for aligning exposure equipment in the process of exposing to form the diagram of a first film layer on the display baseplate. The thickness of the middle area of the alignment mark is less than that of the marginal area of the alignment mark so that the thickness of the alignment mark is uniform after being coated with a photoresist. The alignment mark of the display baseplate cannot be in the shape of a Chinese character hui after being coated with the photoresist, and the surface of the alignment mark is flat, is uniform in gray scale and is clear in boundary after being coated with the photoresist, thus the problem that the exposure equipment cannot be focused can be solved, the automatic aligning and exposing of the exposure equipment can be realized, and the production efficiency can be improved.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to a display substrate, a display panel and a display device. Background technique [0002] A liquid crystal display (LCD: Liquid Crystal Display) has become a mainstream product in flat panel displays due to its small size, low power consumption, and no radiation. The liquid crystal display panel is a key component in a liquid crystal display. A liquid crystal display panel generally includes an array substrate and a color filter substrate. [0003] In the preparation process of the color filter layer (including the red color filter layer, the green color filter layer and the blue color filter layer) in the color filter substrate, usually the photoresist materials of different colors forming the color filter layer are coated on the substrate , in the exposure process, the alignment mark set on the substrate is captured by the image sensor CCD in the exposure machine, so ...

Claims

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Application Information

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IPC IPC(8): G02F1/1333G02F1/136
CPCG02F1/1333G02F1/136G03F9/00
Inventor 王耸
Owner BOE TECH GRP CO LTD
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