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A seed chuck assembly

A seed crystal chuck and component technology, applied in the directions of crystal growth, single crystal growth, single crystal growth, etc., can solve the problems of poor neutrality and low efficiency of the flexible shaft system, and achieve improved stability, simple and convenient operation, and shortened The effect of assembly time

Active Publication Date: 2017-08-08
GRINM SEMICONDUCTOR MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When replacing the seed crystal chuck, install and separate from the metal sheet at the lower end of the flexible shaft and the seed crystal chuck, which is relatively inefficient
In addition, since the lower end of the existing flexible shaft is a metal sheet, the alignment of the flexible shaft system is poor

Method used

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  • A seed chuck assembly
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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] The seed crystal chuck assembly of the present invention is used to connect the seed crystal. On a 20-inch thermal field, 90 kg of material is fed to pull P-type , 8-12 ohm·cm crystals. The average pulling speed is 45 mm / hour. Turning to 12rpm, crucible turning to -8rpm, the diameter and weight of the grown crystals were 156mm and 85KG respectively. There was no shedding and swinging of the flexible shaft, and the growth was stable.

Embodiment 2

[0026] The seed crystal chuck assembly of the present invention is used to connect the seed crystal. On a 24-inch thermal field, 170kg of material is fed to pull N-type , 10-35 ohm cm crystals. The average pulling speed is 32 mm / hour. Turning to 10rpm, crucible turning to -9rpm, the diameter and weight of the grown crystals are 335mm and 148KG respectively. There was no shedding and swinging of the flexible shaft, and the growth was stable.

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PUM

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Abstract

The invention provides a seed crystal chuck assembly, including a flexible shaft, a connecting rod and a seed crystal chuck. The connecting rod is composed of an upper connecting rod, an anti-off block, and a lower connecting rod. The top of the upper connecting rod is provided with A round platform has a groove along the central axis of the upper connecting rod on its side, and the groove matches the structure of the lower end of the flexible shaft; Enter the slot, and be provided with a stopper matching the groove of the upper connecting rod; the lower connecting rod is connected with the seed crystal chuck through a pin. The invention is used to connect the seed crystal in the Czochralski silicon single crystal furnace. When replacing the seed crystal chuck, it is not necessary to remove it from the flexible shaft, so that the quick connection between the seed crystal chuck and the lower end of the flexible shaft can be realized simply and quickly, shortening the The assembly time is shortened, and the production efficiency of silicon single crystal rods is improved.

Description

technical field [0001] The invention relates to a seed crystal chuck assembly, which is used for connecting seed crystals in a Czochralski silicon single crystal furnace. Background technique [0002] Currently, about 85% of semiconductor silicon single crystals are produced by the Czochralski method. The Czochralski method is also known as the Czochralski method. In this method, polysilicon is put into a quartz crucible, heated and melted, and then the molten silicon is slightly cooled, given a certain degree of supercooling, and a silicon single crystal (called a seed crystal) with a specific crystal orientation is mixed with the melt. Silicon contact, by adjusting the temperature of the melt and the upward lifting speed of the seed crystal, when the seed crystal grows to a diameter close to the target, increase the lifting speed to make the single crystal grow with a nearly constant diameter. At the end of the growth process, when the silicon melt in the crucible has no...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B15/32C30B29/06
Inventor 姜舰崔彬戴小林韩秋雨王雅楠吴志强
Owner GRINM SEMICONDUCTOR MATERIALS CO LTD