An automatic production line for continuous winding magnetron sputtering coating on one side of flexible substrate
A magnetron sputtering coating and automatic production line technology, which is applied in sputtering coating, ion implantation coating, vacuum evaporation coating, etc., to save the time of vacuuming, reduce labor, and reduce the cost of coating
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[0038] combine figure 1 As shown, an automatic production line for continuous winding magnetron sputtering coating on one side of a flexible substrate in this embodiment includes an unwinding chamber 1, a winding chamber 22 and a coating vacuum chamber 9, and a pre-processing mechanism is arranged in the coating vacuum chamber 9 10. Cool roll 11 and one or more magnetron sputtering coating mechanisms 13. Considering that the traditional coating equipment can only coat one roll of substrate at a time, it needs to re-evacuate to meet the coating process conditions before coating another roll of substrate, which wastes a lot of time for changing rolls and vacuuming, thereby reducing the coating efficiency In this embodiment, the substrate to be coated and the roller to be wound are prepared in advance, and the substrate to be coated and the roller to be wound are brought to vacuum conditions in advance, thus solving the problem that traditional coating equipment cannot continuous...
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