Energetic metal bridge membrane mems igniter with composite blackbody-like energy-gathering structure and preparation method thereof

Abstract

The invention discloses an energy-containing metal bridge film MEMS igniter with a composite black body-like energy-gathering structure and a preparation method thereof. The igniter sequentially includes a SiO2 bottom layer, a cavity layer, a leak-proof SiO2 layer, and a secondary radiation layer from bottom to top. , insulating SiO2 layer, lower electrode Au layer, CuO layer, Al layer and upper electrode Au layer. The SiO2 bottom layer, the cavity layer, the leak-proof SiO2 layer and the secondary radiation layer form a black body energy-gathering structure; the structure of the cavity in the cavity layer is hollow and tapered to gather energy, reduce the overall heat capacity of the device and suspend the secondary radiation layer. The CuO layer and the Al layer constitute the energetic metal bridge film. After adding the blackbody-like energy-gathering structure in the present invention, the heat dissipation of the energetic metal bridge film MEMS igniter is reduced, and the ignition output is improved; the heat accumulation time is also shortened, thereby reducing the ignition delay time and improving the instantaneity of ignition; In addition, micromachining is easy to realize, which is beneficial to its integration.

Description

technical field [0001] The invention relates to the field of basic components of electrical explosive devices, in particular to an energy-containing metal bridge membrane MEMS igniter with a composite blackbody-like energy-gathering structure and a preparation method thereof. Background technique [0002] Electric pyrotechnics is a device that converts electrical energy into the initial energy that triggers the combustion, explosion, and work of energetic materials. It is widely used in blasting engineering, smart ammunition, small-caliber weapons, micro-nano satellite attitude control, and automotive airbags. Micro-nano manufacturing and integrated integration is an unavoidable task in the field of modern equipment manufacturing to reduce weight, miniaturize and make smart. The MEMS igniter not only has the advantages of MEMS small size, large-scale manufacturing, low cost, and high functional integration, but also can greatly reduce the amount of sensitive igniting agents ...

AI Technical Summary

Problems solved by technology

However, the thermal barrier packaging has the following disadvantages: the thermal barrier packaging material absorbs heat energy and then radiates it out, which is difficult, slow, or even not radiated out, which is not conducive to the instantaneous and efficient use of the igniter to ensure rapid ignition; thermal barrier materials are mostly ceramics and polymers. Micromachining is difficult, which will greatly increase the difficulty of microintegration; at the same time, due to poor thermal conductivity, thermal barrier materials are prone to uneven heating, and the temperature close to the semiconductor bridge surface is high while the temperature away from the surface is low. The thermal barrier material is inconsistent with the material of the semiconductor bridge layer, and there is a heat conduction interface heat capacity, and the heat shielded by the thermal barrier material is hindered from being transferred to the semiconductor bridge layer. The above shows that the thermal barrier material reduces the mechanical reliability of the igniter, so a new one is needed. Consumption reduction methods and ideas

However, so far, there have been no reports of applying this technology to energetic metal bridge membrane MEMS igniters.

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