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Efficient energy-saving vacuum hot-pressing crystal pulling method of high quality semiconductor refrigeration member

A vacuum hot pressing, high-efficiency and energy-saving technology, applied in chemical instruments and methods, crystal growth, single crystal growth, etc., can solve the problems of poor product quality stability, low effective utilization, waste of energy, etc. Improve utilization and save power

Inactive Publication Date: 2015-06-10
河南恒昌电子有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the prior art, the process of manufacturing semiconductor crystal ingots is as follows: first, the raw materials—that is, bismuth tritelluride, etc., are broken, put into glass tubes, vacuumized, melted and swayed, and zone melted. Such production methods are Zone melting method, such a production process has the disadvantages of complex process, waste of energy, poor product quality stability, and low effective utilization rate

Method used

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  • Efficient energy-saving vacuum hot-pressing crystal pulling method of high quality semiconductor refrigeration member

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] a. Break the raw material into more than 300 meshes. The raw material used is the same as the zone melting method and other methods, that is, bismuth tritelluride, or a small amount of auxiliary raw material is also added. Those skilled in the art should know that the present invention is compatible with the raw material The composition is irrelevant, that is, as long as it is the raw material of semiconductor grains, it is suitable;

[0019] b. Put the material in the above a above into a hydrogen reduction furnace to evacuate and inject hydrogen to heat for reduction;

[0020] Reduction with hydrogen gas removes a small amount of oxidized substances inside, which can better ensure product quality.

[0021] The above two steps a and b are the same in the following embodiments, and the steps will be described in detail.

[0022] c. Put the material in the above b into a vacuum hot pressing mold to carry out current hot pressing, such as figure 1 As shown, the mold inc...

Embodiment 2

[0025] The two steps of a and b are the same as above;

[0026] c. Put the material in the above b into a vacuum hot-pressing mold for current hot-pressing. The mold includes a mold cylinder and a pressure piece, the structure is the same as above, the initial pressure is not less than 1.2 tons / square centimeter, and the current is 7A / square cm, the cross-sectional area of ​​the mold cylinder is 4 square centimeters, the current passing between the two pressure parts is 28A, when the temperature is energized to 310°C, the pressure is adjusted to 16 tons / square centimeter and kept for 65 minutes, when the temperature reaches 460°C , adjust the pressure again to reach 22 tons / square centimeter, keep it for 20 minutes, turn off the heating power supply, and allow it to cool down naturally to obtain the crystal pulling rod.

[0027] In this way, the quality of the refrigerating parts made from the produced ingots is better, and not only can be used as refrigerating parts, but also...

Embodiment 3

[0029] The two steps of a and b are the same as above;

[0030] c. Put the material in the above b into a vacuum hot-pressing mold for current hot-pressing. The mold includes a mold cylinder and a pressure piece with the same structure as above; the initial pressure is 0.85 tons / square centimeter, and the current is 4A / square centimeter , the cross-sectional area of ​​the mold cylinder is 4 square centimeters, and the current passing between the two pressure parts is 16A. When the power is turned on and the temperature is raised to 280°C, the pressure is adjusted to 8 tons / square centimeter and kept for 1 hour. When the temperature reaches 420°C , adjust the pressure again to reach 17 tons / square centimeter, keep it for 70 minutes, turn off the heating power supply, and allow it to cool down naturally to obtain the crystal pulling rod.

[0031] Like this, the refrigerating piece product that the crystal rod that produces is further made is poorer.

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Abstract

The invention relates to the technical field of semiconductor production, and provides an efficient energy-saving vacuum hot-pressing crystal pulling method of a high quality semiconductor refrigeration member. The method comprises the following steps: a, crushing the raw materials into more than 300 mesh; b, vacuumizing the material in a hydrogen reduction furnace, injecting hydrogen and heating for reduction; c, conducting energizing hot-pressing on the material from the step b in a vacuum hot-pressing mold to obtain molds including a mold cylinder and pressure members, wherein mold cylinder the is provided with an internal insulation structure with through hole in the middle, and the conductive pressure members at both ends of the mold cylinder cooperate with the through hole; applying current respectively at two ends of the pressure members, turning off the heating power, and cooling naturally to obtain a crystal pulling rod. The invention has the advantages of high product quality and energy saving.

Description

technical field [0001] The invention relates to the technical field of semiconductor production, in particular to a method for pulling crystals from semiconductor crystal rods. Background technique [0002] Semiconductor crystal ingot is the raw material for manufacturing semiconductor crystal grains, and semiconductor crystal grains are components for manufacturing semiconductor refrigeration parts. When semiconductor crystal ingots are formed, the molecules inside need to be arranged neatly. The process of arranging the molecules inside is called Crystal pulling. In the prior art, the process of manufacturing semiconductor crystal ingots is as follows: first, the raw materials—that is, bismuth tritelluride, etc., are broken, put into glass tubes, vacuumized, melted and swayed, and zone melted. Such production methods are The zone melting method, such a production process has the disadvantages of complex process, waste of energy, poor product quality stability, and low eff...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B13/00
Inventor 刘宝成
Owner 河南恒昌电子有限公司
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