A suspended multi-claw grid combination and its assembly method
A floating, grid technology, applied in the field of ion sources, can solve the problems of high ion beam current density, ion beam current quenching, poor insulation, etc., to reduce sensitivity, avoid ion beam current quenching, and be beneficial to The effect of density
Active Publication Date: 2017-02-22
FLIGHT AUTOMATIC CONTROL RES INST
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Problems solved by technology
However, it has the problem of poor insulation: if the output of a large ion beam current of hundreds or even thousands of milliamperes is to be realized, the number of holes on the grid is generally very large, and the density of the ion beam current in each hole It is also very large, and a small positioning error will cause a short circuit between the grids, resulting in the quenching of the ion beam
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[0033] The present invention will be described in further detail below by means of specific embodiments:
[0034] see figure 1 , which is a top view of the suspended multi-claw grid involved in the present invention. The middle of the suspended multi-claw grid is the working area for generating ion beams, and several circumferentially symmetrical grid claws 1 are arranged on the edge. Wherein, a central hole 2 and several screw holes 3 surrounding the central hole 2 and distributed symmetrically in a circle are arranged in the middle of the grid claw.
[0035] The plug-type insulating fastening structure of the suspended multi-claw grid of the present invention comprises insulating ceramic bushings, concave insulating ceramics, convex insulating ceramics, bolts and nuts. Among them, the accelerating grid is sleeved on the bolt, and the upper and lower sides are fixed by concave insulating ceramics and convex insulating ceramics, and the concave insulating ceramics and convex...
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The invention belongs to the ion source technology, and relates to a pouring plug type insulating and fastening structure of a suspension-type multi-claw grid and an assembling method thereof. The surface of the grid is provided with small holes which are distributed in a honeycomb mode. The periphery of the grid is of a circular-symmetrical suspension-type multi-claw structure. The three grids are fastened by the suspension claws. Each claw of the three grids is fixed by adopting a screw penetrating-type fastening structure. The grids are supported by adopting concave insulating ceramics and convex insulating ceramics in a matched mode, and space distance regulating is carried out on the three grids by adopting metal thin gaskets. By adjusting on the suspension claws, the consistency of the grid space distances is guaranteed, meanwhile the requirement on consistency of surface shapes of the three grids is lowered, by matched using of the two-type ceramics, the insulating degree of the grids is improved, and stable drawing of the large pressure and the large ion beam under the high-temperature working condition is guaranteed.
Description
technical field [0001] The invention belongs to the ion source technology, and relates to a plug-type insulating fastening structure and an assembly method of a suspended multi-claw grid. Background technique [0002] The ion source is a device that generates ion beams, which can be used in systems such as ion sputtering deposition coating and ion beam etching. The ion source grid assembly is the core component for generating large beam current and directional ion beam. There are a large number of small holes in a honeycomb arrangement on the grid. A typical grid assembly is composed of two grids, which are called the beam voltage pole and the accelerator pole respectively. Generally, a positive voltage of several hundred to several thousand volts is applied to the beam voltage electrode, and a negative voltage of several hundred volts is applied to the accelerator electrode. [0003] In order to ensure the focusing and collimating characteristics of the ion beam, one to ...
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IPC IPC(8): H01J27/02
CPCH01J27/022
Inventor 苏宇刘希强任旭升张爱民王涛
Owner FLIGHT AUTOMATIC CONTROL RES INST