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Thin-film permeameter and measuring method thereof

A technology of permeation meter and membrane, which is applied in the field of chemical engineering, can solve the problems of complex measurement process, low precision of measurement results, failure to eliminate the influence of membrane leakage and degassing and environmental temperature fluctuations, etc., and achieve simple measurement process and accurate measurement results Effect

Active Publication Date: 2015-06-24
HUANGSHAN TIANZHIDU ENVIRONMENTAL SCI & TECH DEV CO LTD
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  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the film has not eliminated the influence of gas leakage and ambient temperature fluctuations in the process of gas permeability measurement, resulting in complicated measurement process and low accuracy of measurement results, and provides a Thin film permeameter and its measurement method to solve the above problems

Method used

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  • Thin-film permeameter and measuring method thereof
  • Thin-film permeameter and measuring method thereof
  • Thin-film permeameter and measuring method thereof

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specific Embodiment approach 1

[0025] Specific Embodiment 1: This embodiment is a membrane permeation instrument including a mechanical pump 1, a molecular pump 2, a first valve 3, a gas source 4, a second valve 5, a high pressure chamber 6, a vacuum gauge 7, a gas permeation unit 8, Measuring chamber 9, differential pressure transmitter 10, third valve 11, heating belt 12, reference chamber 13, fourth valve 14;

[0026] The mechanical pump 1 and the molecular pump 2 are vacuum pumping units; the molecular pump 2 communicates with the high-pressure chamber 6 through the first valve 3; the molecular pump 2 communicates with the reference chamber 13 through the fourth valve 14; the gas source 4 communicates with the second valve 5 communicates with the high-pressure chamber 6; the measuring chamber 9 communicates with the reference chamber 13 through the third valve 11; the gas permeation unit 8 separates the high-pressure chamber 6 from the measuring chamber 9; the vacuum gauge 7 is connected with the high-pr...

specific Embodiment approach 2

[0027] Embodiment 2: This embodiment differs from Embodiment 1 in that the volume of the high-pressure chamber 6 is 20 times that of the measurement chamber 9 and the reference chamber 13 . Other steps are the same as in the first embodiment.

specific Embodiment approach 3

[0028] Embodiment 3: This embodiment differs from Embodiment 1 to Embodiment 2 in that the vacuum gauge 7 measures the pressure of the high-pressure chamber 6 to ensure that the pressure in the high-pressure chamber 6 is 101325 Pa. Other steps are the same as those in Embodiments 1 to 2.

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Abstract

The invention discloses a thin-film permeameter and a measuring method thereof, belongs to the technical field of chemical engineering and relates to a device used for measuring gas permeability of thin films and a measuring method thereof. With an aim to solve the problem that an existing method for measuring gas permeability of the thin films is low in accuracy of measuring results and complicated in measuring process due to gas leak and discharge and temperature changes in the environment, the device comprises a mechanical pump, a molecular pump, a valve, a gas source, a heating band, a vacuometer, a high-pressure cavity, a gas permeation unit, a measuring chamber, a reference chamber and a differential pressure transmitter, wherein the differential pressure transmitter records change law of pressure difference of the measuring chamber and the reference chamber over time, and calculates the gas permeability of the thin films according to the formula Q=Vdp / dt, J=Q / ART and K=Jh / delta P. The device is applicable to accurately measuring the gas permeability of the thin films and measuring process is simple.

Description

technical field [0001] The invention belongs to the technical field of chemical engineering, and relates to a membrane permeameter and a measuring method thereof. Background technique [0002] Vacuum thin film technology has been widely used in modern industrial production and daily life, such as display, semiconductor, solar energy, aerospace and other fields. With the increasing application of thin films, the requirements for gas permeability measurement of thin films are becoming more and more important. For example, in aerospace, the permeability of thin films to gas affects the safety and use of aircraft; future lighting and display technologies will use OLED as For functional materials, the permeability of the film to gas is the most critical factor affecting the service life of such devices; the applications in medicine, biology, chemistry, etc. are largely based on their use of various gas permeability characteristics . [0003] At present, the main methods for mea...

Claims

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Application Information

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IPC IPC(8): G01N15/08
Inventor 王旭迪董栋尉伟杨丹朱郑乔若郑丁杰桑艾霞郑梦瑜
Owner HUANGSHAN TIANZHIDU ENVIRONMENTAL SCI & TECH DEV CO LTD
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