Thin-film permeameter and measuring method thereof

A technology of permeation meter and membrane, which is applied in the field of chemical engineering, can solve the problems of complex measurement process, low precision of measurement results, failure to eliminate the influence of membrane leakage and degassing and environmental temperature fluctuations, etc., and achieve simple measurement process and accurate measurement results Effect
CN104729973AActive Publication Date: 2015-06-24HUANGSHAN TIANZHIDU ENVIRONMENTAL SCI & TECH DEV CO LTD
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Patent Information

Authority / Receiving Office
CN Β· China
Current Assignee / Owner
HUANGSHAN TIANZHIDU ENVIRONMENTAL SCI & TECH DEV CO LTD
Publication Date
2015-06-24

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Abstract

The invention discloses a thin-film permeameter and a measuring method thereof, belongs to the technical field of chemical engineering and relates to a device used for measuring gas permeability of thin films and a measuring method thereof. With an aim to solve the problem that an existing method for measuring gas permeability of the thin films is low in accuracy of measuring results and complicated in measuring process due to gas leak and discharge and temperature changes in the environment, the device comprises a mechanical pump, a molecular pump, a valve, a gas source, a heating band, a vacuometer, a high-pressure cavity, a gas permeation unit, a measuring chamber, a reference chamber and a differential pressure transmitter, wherein the differential pressure transmitter records change law of pressure difference of the measuring chamber and the reference chamber over time, and calculates the gas permeability of the thin films according to the formula Q=Vdp / dt, J=Q / ART and K=Jh / delta P. The device is applicable to accurately measuring the gas permeability of the thin films and measuring process is simple.
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Description

technical field

[0001] The invention belongs to the technical field of chemical engineering, and relates to a membrane permeameter and a measuring method thereof. Background technique

[0002] Vacuum thin film technology has been widely used in modern industrial production and daily life, such as display, semiconductor, solar energy, aerospace and other fields. With the increasing application of thin films, the requirements for gas permeability measurement of thin films are becoming more and more important. For example, in aerospace, the permeability of thin films to gas affects the safety and use of aircraft; future lighting and display technologies will use OLED as For functional materials, the permeability of the film to gas is the most critical factor affecting the service life of such devices; the applications in medicine, biology, chemistry, etc. are largely based on their use of various gas permeability characteristics .

[0003] At present, the main methods for mea...

Claims

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