Diffraction optical element shaping Gaussian beam into one-dimensional flattened beam or rectangular flattened beam

A diffractive optical element, flat-top beam technology, applied in optical elements, diffraction gratings, optics, etc., can solve the problems of complex preparation process, and achieve the effects of high energy transmittance, flexible use, and simple installation and use

Inactive Publication Date: 2015-07-08
北京润和微光科技有限公司
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  • Summary
  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

The advantages of the Gaussian to flat-top conversion of the diffraction element lie in the high flexibility, the divergence angle of the final beam, and the controllable spot shape, etc. The difficulty lies in the complicated preparation process

Method used

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  • Diffraction optical element shaping Gaussian beam into one-dimensional flattened beam or rectangular flattened beam
  • Diffraction optical element shaping Gaussian beam into one-dimensional flattened beam or rectangular flattened beam
  • Diffraction optical element shaping Gaussian beam into one-dimensional flattened beam or rectangular flattened beam

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Embodiment Construction

[0035] The DOE of the present invention should cooperate with other optical elements to obtain the final required one-dimensional flat-hat beam or rectangular flat-hat beam. Other optical components refer to: beam expander and collimator, which is used to expand and collimate the original incident beam, and the diameter of the beam waist after collimation should be larger than the size of the active area of ​​the DOE. For example, for a square step or groove sample, the collimated beam waist diameter should completely cover the entire area of ​​the square step or groove. For samples with circular steps or grooves, the diameter of the beam waist after collimation should be at least 2 mm larger than the diameter of the circular steps or grooves. The focusing lens is used to converge the DOE-shaped light spot and generate the final one-dimensional top-hat beam or rectangular top-hat beam.

[0036] Specific implementation methods include:

[0037] 1. According to the parameters ...

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Abstract

The invention provides a diffraction optical element shaping Gaussian beam into a one-dimensional flattened beam or a rectangular flattened beam. The diffraction optical element is called DOE for short. A manufacturing method of the DOE is also provided. Grooves or steps which are in different shapes and have different sizes are manufactured at the center of a quartz substrate, the DOE is arranged at different positions in a light path, the DOE is matched with a beam expanding collimating mirror and a focusing lens, and then the one-dimensional flattened beam or the rectangular flattened beam is formed. The DOE has the following prominent advantages of being high in energy transmittance rate, insensitive to the change of a lasing mode and easy and flexible to install and use.

Description

technical field [0001] The invention relates to the technical field of laser beam shaping, a diffractive optical element and a preparation method for shaping a Gaussian beam into a one-dimensional flat-topped beam (a Gaussian distribution in the short direction, and a flat-topped distribution in the long direction); a method for shaping the Gaussian beam into a A diffractive optical element for a rectangular top-hat beam and a manufacturing method thereof. Background technique [0002] At present, the laser processing industry, especially the development of laser drilling equipment, laser welding equipment and laser display equipment, has put forward higher and higher requirements for beam quality. On the one hand, fine processing requires laser spots to be smaller and smaller. Hole equipment is already capable of punching holes with a diameter of tens of microns. On the other hand, fine processing requires that the laser spot is flat-topped rather than Gaussian. The so-ca...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18G02B27/09G03F7/20
CPCG02B27/0944G02B27/0927
Inventor 马衍强王晓峰潘岭峰彭亦超
Owner 北京润和微光科技有限公司
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