Heat transfer structure and manufacturing method thereof
A manufacturing method and technology of thermal conductivity, applied in semiconductor/solid-state device manufacturing, electrical components, electric solid-state devices, etc., can solve problems such as low thermal conductivity, low thermal conductivity of TIM material 50, low thermal conductivity of TIM material, etc., to achieve Effect of increasing thermal conductivity, eliminating or minimizing interfacial thermal resistance
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[0056] In the heat transfer structure 100 with the configuration of the direct heat path according to the first embodiment of the present invention, the heat generated in the first object 120 passes through the heat conductive material 151 consisting of only one layer and is transferred to the second object 130 . In this case, an interfacial thermal resistance on a path through which heat passes may be smaller than an interfacial thermal resistance when heat passes through a plurality of thermally conductive materials connected to each other in series. Therefore, according to the first embodiment of the present invention, thermal conductivity higher than that of conventional TIM materials can be obtained.
[0057] In addition, since at least one thermally conductive material 151 is uniform in size, in the case where any one of the thermally conductive materials 151 is in contact with the first object 120 and the second object 130, the remaining thermally conductive material 15...
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