Upper electrode of a capacitive plasma electrode

Abstract

An upper electrode of a capacitive plasma electrode has an axisymmetric structure and is divided into two parts, an upper cover and a straight cylinder (25), and the upper cover and the straight cylinder (25) are welded as one. The upper cover includes two metal straight cylinders with different diameters, two metal rings with different inner and outer diameters and a first insulating ring (7). In the upper cover, the small diameter metal straight cylinder (41), the small inner diameter metal ring (42), the large diameter metal cylinder (51), the large inner diameter metal ring (52), and the first insulating ring (7) are coaxial up and down in sequence layout. The first insulating ring (7) is fixed on the bottom surface of the large inner diameter metal ring (52). A pair of tubular heater power supply inlets (24) are arranged on the side where the large-diameter metal ring (52) is welded to the large-diameter metal straight cylinder (51). The bottom of the straight cylinder (25) outer wall is provided with a coolant inlet (23), and the top has a coolant outlet (22), and the coolant is connected to the external circulation device through the coolant inlet (23) and the coolant outlet (22).

Description

technical field [0001] The invention relates to a plasma electrode, in particular to an upper electrode of a capacitive plasma electrode with an internal heater. Background technique [0002] The initial period of plasma experimental research can be traced back to the 1830s. British M. Faraday and later J.J Thomson, J.S.E Townsend and others successively studied gas discharge phenomena. In 1879, British W. Crooks used " The term "the fourth state of matter" describes the electric gas in the gas discharge tube. In 1928, I. Langmuir in the United States first introduced the word plasma. [0003] At present, the application of plasma has been extended to many fields, such as mechanical processing, chemical industry, metallurgy, surface treatment, aerodynamic thermal simulation and so on. In the solar cell manufacturing process in the new energy field, plasma is fully used, such as the preparation of anti-reflection film, conductive film, and various passivation films, all need...

AI Technical Summary

Problems solved by technology

One is to install heaters around the upper and lower electrodes inside the plasma equipment. Although the gas ionization will be improved, there will be problems that cannot be completely solved and new problems. One is that there will be a large number of thin films inside the plasma chamber. The second is that the temperature of the lower electrode will drop after the gas is introduced, and a large amount of gas will be wasted in the process of temperature recovery; the other is to install a heater on the external air intake pipeline of the plasma equipment to improve The temperature of the air source is problematic, but there are also problems. The diameter of the intake pipe is small. If the temperature control is not good after installing a heater outside it, some easily decomposed gases will be deposited on the inner wall of the intake pipe, which will cause blockage and pose a safety hazard.

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