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Operation number-counting piezoelectric dispenser

一种压电分配器、计算式的技术，应用在仪器、电路、电气元件等方向，能够解决制程不良、无法分配溶液或溶液分配用量不准确、压电致动器疲劳破坏等问题，达到防止不良品的产生、防止损失、提高生产性的效果

Active Publication Date: 2015-09-02
PROTEC CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the process of distributing solutions to semiconductor elements using piezoelectric pumps, if such a phenomenon of fatigue failure of piezoelectric actuators occurs, there will be the following problems: the solution cannot be dispensed or the amount of solution dispensed is inaccurate, resulting in defective processes.

Method used

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  • Operation number-counting piezoelectric dispenser
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  • Operation number-counting piezoelectric dispenser

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0022] Hereinafter, the life-calculating piezoelectric distributor of the present invention will be described in detail with reference to the accompanying drawings.

[0023] figure 1 It is a front view of a life-calculating piezoelectric distributor according to an embodiment of the present invention, figure 2 yes figure 1 A perspective view of the piezoelectric pump of the life-calculating piezoelectric distributor shown, image 3 yes figure 2 Side view of the lifetime-calculated piezoelectric distributor shown.

[0024] refer to Figure 1 to Figure 3 , The life-calculating piezoelectric distributor of this embodiment has a piezoelectric pump (100) and a control unit (200). A piezoelectric pump (100) has a pump body (10), a lever (30), piezoelectric actuators (51, 52), a valve stem (40), a valve body (20), and a lifetime storage unit (221).

[0025] Such as figure 1 As shown, the pump body (10) and the valve body (20) are detachably combined using a screw (bolt).

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PUM

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Abstract

The present invention relates to an operation number-counting piezoelectric dispenser, more specifically to a dispenser equipped with a piezoelectric pump for dispensing a solution by using a piezoelectric element as an actuator. An operation number-counting piezoelectric dispenser according to the present invention allows a piezoelectric actuator to be replaced before damage occurs thereto by preemptively predicting same, thereby preventing process loss and production of defective products, and thus has the benefit of enhancing productivity.

Description

technical field [0001] The present invention relates to a life-calculating piezoelectric dispenser, and more particularly to a dispenser having a piezoelectric pump (piezoelectric pump) that dispenses a solution using a piezoelectric element as an actuator. Background technique [0002] Dispensers that supply liquid solutions such as water, oil, and resin in a fixed amount are used in various fields such as semiconductor manufacturing and medical fields. [0003] In particular, in the semiconductor manufacturing process, the dispenser is often used in the underfill process, and the dispenser is also frequently used for filling the inside of the package of the semiconductor device with resin. In the process of manufacturing light emitting diode (Light Emitting Diode, LED) components, the dispenser is used in the process of coating the fluorescent liquid mixed with fluorescent material and resin on the LED chip. [0004] This type of dispenser uses a pump (pump) that receives...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B43/04F04B49/06B05B17/06H01L21/02
CPCF04B17/03F04B43/04F04B49/06B05C5/0225F04B43/046F05B2210/11G06M1/108G07C3/02G07C3/08H01L21/563Y10S417/00F04B17/003
Inventor 洪承珉李汉晟李勇勳金民善
Owner PROTEC CO LTD
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