Partial compensation lens system and design method of concave parabolic mirror for non-zero position detection
A non-zero position detection and compensation lens technology, applied in the field of optics, can solve the problems of imperfect constraints and low practicability, and achieve the effect of improving convenience and perfecting constraints
Active Publication Date: 2017-08-15
ZHEJIANG UNIV
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[0005] The purpose of the present invention is to address the deficiencies of the prior art, provide a partial compensation lens system and design method for the non-zero position detection concave paraboloid mirror, and solve the problem of partial compensation lens design in the prior art for the universal detection of concave parabolic mirrors Technical problems with imperfect time constraints and low practicability
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Embodiment 1
[0072] An example of the application of the present invention to the design of a partially compensated lens system for a non-zero detection concave parabolic mirror is described below.
[0073] figure 1 The optical path diagram of the concave parabolic mirror is detected by the non-zero position of the phase shift interferometer, such as figure 1 It is shown that a given part of the compensation lens can compensate the parabolic mirror under test within a certain parameter range. Based on this principle, a partial compensation lens system that can generalize the detection of concave parabolic mirrors is designed. 1) Calculation of the initial structure—design a partial compensation lens for the tested parabolic mirror with a diameter of 101mm and apex curvature radius of 240mm. The F number of the parabolic mirror is 1.19. For the convenience of actual processing and application, the diameter of the designed part of the compensation lens is limited to 45mm, and the laser wav...
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The invention discloses a partial compensation lens system of a non-null detection concave parabolic mirror and a design method of the partial compensation lens system. The partial compensation lens system is composed of a plurality of partial compensation lenses; and the overall compensation range of the partial compensation lens system covers parameters of commonly-used detected parabolic mirrors. The design method includes the following steps that: an initial structure of a partial compensation lens is calculated for a tested parabolic mirror of which the F number is smaller than 1.2; a constraint condition is set, and the parameters of the initial structure of the partial compensation lens are optimized in a detection path model; the parameters of the detected parabolic mirror are changed, the distance between the detected parabolic mirror and the partial compensation lens is adjusted, so that the parameter boundary of the detected parabolic mirror can be determined, and a compensation range D-R diagram is drawn; a new partial compensation lens is designed for a tested parabolic mirrors of which the F number is smaller than 1.2 in an uncompensable area until a plurality of partial compensation lenses cover the parameter range of the commonly-used detected parabolic mirrors; and the plurality of partial compensation lenses are screened, so that a compensation ability database can be constructed. With the partial compensation lens system of the non-null detection concave parabolic mirror and the design method of the partial compensation lens system of the invention adopted, problems existing in partial compensation lens compensation range analysis and system design can be solved, and general detection of parabolic mirrors can be realized.
Description
technical field [0001] The invention relates to the field of optical technology, in particular to a partial compensation lens system and a design method of a non-zero detection concave parabolic mirror. Background technique [0002] When performing non-zero interferometric detection on aspheric mirrors, the partial compensation lens reduces the wavefront slope returning to the image plane of the interferometer detector to the resolvable range by compensating most of the normal aberration of the measured surface, making the system The ability to collect clear interference fringes is a key component of the partial compensation method for interferometric detection of aspheric surfaces. The partially compensated lens does not need to perform complete zero compensation on the measured surface, as long as the wavefront slope at the detector is within the resolvable range, so a partially compensated lens with one parameter can detect aspheric mirrors within a certain parameter rang...
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IPC IPC(8): G02B27/00
CPCG02B27/0012G02B27/0025
Inventor 刘东杨甬英师途种诗尧张磊
Owner ZHEJIANG UNIV