Cooling chamber and semiconductor processing equipment
A cooling cavity and cooling system technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of increased production cost, long cooling time, low process efficiency, etc., to reduce cooling costs, improve cooling efficiency, The effect of improving process efficiency
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0024] In order for those skilled in the art to better understand the technical solution of the present invention, the cooling chamber and semiconductor processing equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0025] figure 2 A schematic structural diagram of a cooling chamber provided by an embodiment of the present invention. see figure 2 , the cooling chamber 20 provided by the present invention, the cooling chamber 20 includes a base 21 and a base cooling system, wherein the base 21 is arranged in the cooling chamber 20, and the substrate S to be cooled is placed on the upper surface of the base 21 Above, the pedestal 21 is cooled by means of heat conduction by means of the pedestal cooling system. Specifically, the pedestal cooling system is connected to the lower surface of the pedestal 21, so that the pedestal 21 cools the substrate S to be cooled by heat conduction. Compared with the coo...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com