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A stacked piezoelectric motor pressed by opposing friction

A piezoelectric motor, friction technology, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, generators/motors, etc., can solve the problem of insufficient rigidity and compactness, atomic resolution imaging Influence, the thrust is not large enough, etc., to achieve the effect of low noise, high symmetry, and large thrust

Active Publication Date: 2017-07-28
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] This stepper has several important flaws: (1) Rigidity and compactness are still not high enough
(3) The thrust is not large enough
Although the thrust of this stepper has been greatly improved compared to other steppers, the thrust is still not large enough for practical applications
(4) Loud noise
This has a big impact on atomic resolution imaging

Method used

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  • A stacked piezoelectric motor pressed by opposing friction
  • A stacked piezoelectric motor pressed by opposing friction
  • A stacked piezoelectric motor pressed by opposing friction

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] Example 1: Single-end three-stack type stacked piezoelectric motor pressed by opposing friction force

[0034] See attached figure 1 , the stacked piezoelectric motor made of three piezoelectric bodies of the present invention, which is pressed by opposing friction force, includes a parallel double-rail body 1, gaskets 2, 3a, 3c, and is characterized in that it also includes three piezoelectric bodies: two of them are called It is the left piezoelectric body 4a, 4b, and the remaining one is called the middle piezoelectric body 5. The two left piezoelectric bodies 4a, 4b sandwich the left end of the middle piezoelectric body 5, and the two left piezoelectric bodies 4a , There is a spacer 2 between the middle part of 4b and the middle piezoelectric body 5, the piezoelectric deformation directions 6 of these three piezoelectric bodies are the same, the outer sides of the two ends of the two left piezoelectric bodies 4a, 4b and the middle piezoelectric body 5 The two outer...

Embodiment 2

[0037] Example 2: A stacked piezoelectric motor made of stacked single-end three-stacked type using opposing friction force

[0038] The three piezoelectric bodies in the above embodiment can all be selected as stacks of piezoelectric sheets. This will further enhance the rigidity and thrust of the motor.

Embodiment 3

[0039] Example 3: Double-end two-stack type stacked piezoelectric motor made by pressing against friction force

[0040] The inventive point of the present invention is to utilize the total frictional force of paired opposing frictional force to become smaller, far below their total maximum static frictional force when stationary, so, the present invention also can be (referring to figure 2 ): includes parallel double-rail body 1, gaskets 2, 3a, 3b, 3c, and is characterized in that it also includes three piezoelectric bodies: respectively called left piezoelectric body 4a, right piezoelectric body 7a and middle piezoelectric body 5, The left piezoelectric body 4a is stacked on the left end of the middle piezoelectric body 5, and there is a spacer 2 between the middle part of the left piezoelectric body 4a and the middle piezoelectric body 5, and the right piezoelectric body 7a is stacked on the middle piezoelectric body. There is a spacer 2 between the right end of the right ...

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PUM

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Abstract

The invention provides a stacked piezoelectric motor pressed by opposing frictional force, which includes parallel double-rail bodies, gaskets, two left, two right, one middle, five piezoelectric bodies, two left piezoelectric bodies to center The left end of the piezoelectric body is sandwiched in the middle, and the right end of the middle piezoelectric body is sandwiched by two right piezoelectric bodies, and outer gaskets are fixed on the outer sides of the two ends of the four left and right piezoelectric bodies, forming a double-ended three-stack; the double-ended three-stack The stack is elastically clamped between the double rails by the parallel double rail body through its outer gasket; when the two left (right) piezoelectric bodies are stationary and the two right (left) piezoelectric bodies are stretching and vibrating, the two left (right) piezoelectric The maximum static friction sum between the electric outer spacer and the parallel double-rail body is greater than the friction sum between the two right (left) piezoelectric outer spacers and the parallel double-rail body. Its advantages are: small size, strong rigidity, two-way controllable walking, huge thrust, large working temperature range, large stroke, high precision, and is also suitable for working well in extreme physical environments such as ultra-low temperature, ultra-high vacuum, and strong magnetic field. .

Description

technical field [0001] The invention relates to a piezoelectric stepper, in particular to a high-rigidity and large-thrust self-fitting piezoelectric stepper, which belongs to the technical field of piezoelectric positioners. Background technique [0002] A piezoelectric stepper is a piezoelectric positioner that can simultaneously achieve nanometer-level positioning accuracy and centimeter-level travel. It mainly relies on the cumulative effect of piezoelectric deformation effects to generate movement. Due to its small size and high positioning accuracy, piezoelectric steppers are widely used in precision instrument control, atomic / molecular imaging, microelectronics manufacturing, aerospace, biomedicine and many other fields. Indispensable tool. [0003] Since the development of piezoelectric steppers, they have been developing in the direction of high rigidity, small size, high positioning accuracy and large thrust. However, it is very difficult to achieve the improvem...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/02H02N2/04
Inventor 郭颖陆轻铀
Owner UNIV OF SCI & TECH OF CHINA