Unlock instant, AI-driven research and patent intelligence for your innovation.

A kind of coating method and mask jig

A mask fixture and mask technology, which is applied in sputtering plating, ion implantation plating, vacuum evaporation plating, etc., can solve the problem of incapable of one-time coating of quartz pendulum plate, incapable of coating on the side wall of the hollowed out part, and incapable of simultaneous coating And other issues

Active Publication Date: 2017-07-25
CHINA BUILDING MATERIALS ACAD
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The coating method provided by the prior art can only be coated on the outer contour of the target object, and when there are other structural parts blocking the coating part of the target object, for example, when the target object has a hollow part, and the side of the hollow part needs to be When the wall surface is coated, if it cannot be directly exposed due to other surfaces or parts near the side wall surface of the hollow part, the existing technology cannot directly coat the side wall surface of the hollow part in a simple and successful way, let alone realize the target object. One simultaneous coating on the outer contour surface of the
For example, for the coating of quartz pendulum, the quartz pendulum has a complex three-dimensional structure, such as a hollow part, it is impossible to perform one-time coating on the outer contour surface of the quartz pendulum and the inner surface blocked by structural parts by using the existing technology

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A kind of coating method and mask jig
  • A kind of coating method and mask jig
  • A kind of coating method and mask jig

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0057] An embodiment of the present invention provides a coating method. The mask fixture with the target object is fixed on the sample holder, and the target object is coated by magnetron sputtering. During the coating process, the sample holder is flipped along its rotation axis, wherein, The size of the side hollow area of ​​the mask is greater than the design size of the corresponding side coating area of ​​the quartz pendulum; and the angle between the rotation axis of the sample holder and the side coating area of ​​the quartz pendulum should be less than 90°, and the above angle should be less than 90° The meaning of ° means that when the side coating area is a plane, the angle between the rotation axis of the sample holder and the plane where the side coating area is located is less than 90°; when the side coating area is a curved surface, the rotation axis of the sample holder and the plane The included angles of all cut surfaces in the side coating area are less than ...

Embodiment 2

[0063] The difference between embodiment 2 and embodiment 1 is that an elastic member 15 is provided between the upper mask sheet 10, the lower mask sheet 12 and the flexible beam 3, and the elastic member 15 fills the gap between the flexible beam 3 and the outer ring 1. The gap formed between the flexible beam 3 and the upper mask sheet 10 and the lower mask sheet 12 due to the thickness difference between the pendulum 4 and the mass pendulum 4 . In this embodiment, the angles between the rotation axis and the side coating area one 5, the side coating area two 6, the side coating area three 7 and the side coating area four 8 are respectively 35°, 55°, 80° and 80°; The power used for the coating is 150w, and the plating time is 50s. The power used for plating the Au film is 250w, and the plating time is controlled at 1500s. The specific implementation data are shown in Table 1, and the measurement results are shown in Table 3.

Embodiment 3

[0065] The difference between embodiment 3 and embodiment 2 is that the power used when plating the Cr film is 200w, and the plating time is 80s; the power used when plating the Au film is 300w, and the plating time is controlled at 1800s; The oscillating angle and frequency of the source are different, and the rotation rate of the sample holder is different; in this embodiment, the angles between the rotation axis and the side coating area one 5, the side coating area two 6, the side coating area three 7 and the side coating area four 8 are respectively 25 °, 65°, 20° and 20°; see Table 1 for specific implementation data and Table 3 for measurement results.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
radiusaaaaaaaaaa
radiusaaaaaaaaaa
angleaaaaaaaaaa
Login to View More

Abstract

The invention provides a film coating method and a masking jig, and relates to the field of film coating. One-time film coating can be performed on the outline surface and the inner surface blocked by a structural component of a target object. The film coating method disclosed by the invention adopts magnetron sputtering to coat a film on the target object, the target object comprises a first surface, a second surface and a hollow part, wherein the first surface and the second surface are communicated through the hollow part; film coating positions on the two surfaces of the target object are surface coating regions, and film coating positions on the side wall surfaces of the hollow part are side film coating regions. The film coating method comprises the following steps: putting the target object into the masking jig, wherein the masking jig comprises a hollow part corresponding to the film coating positions of the target object, and the size of the hollow part corresponding to the side film coating regions of the masking jig is larger than the design sizes of the side film coating regions; fixing the masking jig for fixing the target object on a sample frame, wherein the sample frame turns over along a rotating shaft of the sample frame in a film coating process, and an inclined angle between the rotating shaft of the sample frame and a plane on which the side film coating regions are arranged or all cutting planes is smaller than 90 degrees.

Description

technical field [0001] The invention relates to the field of film coating, in particular to a film coating method and a mask fixture used in the film coating method. Background technique [0002] Coating technology is widely used in various fields. By coating the surface of an object with a thin film, the physical and chemical properties of the material surface can be changed. Coating technology is mainly used in the fields of optics, electronics, physical and chemical instruments, construction machinery, packaging, surface science and scientific research; common coating methods mainly include evaporation coating method, magnetron sputtering coating method, chemical vapor deposition method and ion coating method, etc. [0003] The prior art provides a processing method for the metallization of a specific quartz structure, which uses a combination of photolithography and a mask, uses evaporation to plate two layers of Cr-Au thin films, and uses photolithography to engrave th...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/04C23C14/14
Inventor 王慧杜秀蓉宋学富孙元成张晓强王佳佳
Owner CHINA BUILDING MATERIALS ACAD