Constant voltage output pulsed power supply with duty ratio adjustable range being 20%-80%

Abstract

The present invention discloses a constant voltage output pulsed power supply with a duty ratio adjustable range being 20%-80%. The constant voltage output pulsed power supply comprises an AC three-phase power supply, a three-phase rectifier and filter circuit, a DC / DC conversion circuit, a full bridge topology circuit, a boost isolation circuit and a pulse unipolarity rectifier, wherein a control signal output end of the AC three-phase power supply is connected with a control signal input end of the three-phase rectifier and filter circuit, a control signal output end of the three-phase rectifier and filter circuit is connected with an input end of the DC / DC conversion circuit, the full bridge topology circuit is connected between the DC / DC conversion circuit and the boost isolation circuit, a control signal output end of the boost isolation circuit is connected with a control signal input end of the pulse unipolarity rectifier, and a control signal output end of the pulse unipolarity rectifier is connected with a load. With adoption of the constant voltage output pulsed power supply, the problem of output voltage reduction when a small duty ratio of a conventional unipolar pulse bias power supply is set is solved, the production efficiency is raised and the labor cost is reduced.

Description

technical field [0001] The invention relates to the field of switching power supplies, in particular to a constant-voltage output pulse power supply with an adjustable duty ratio ranging from 20% to 80%. Background technique [0002] During the pulse electroplating process of the pulse power supply, when the current is turned on, the pulse (peak) current is equivalent to several times or even dozens of times of the ordinary DC current. It is this instantaneous high current density that makes the metal ions reduce under extremely high overpotential , so that the grains of the deposited layer become thinner; when the current is turned off, the discharge ions near the cathode area return to the initial concentration, and the concentration polarization is eliminated, which is beneficial to continue to use high pulse (peak) current density in the same period of the next pulse, At the same time, during the shutdown period, there are also phenomena such as recrystallization and ads...

AI Technical Summary

Problems solved by technology

[0003] The unipolar pulse bias power supply for plasma coating equipment requires constant output pulse voltage, adjustable pulse width of 20%-80%, and power of 30KW. According to different workpieces and different coating materials, the pulse duty cycle needs to be 20%. Set within the range of -80%, the model of USER is BR-30A unipolar pulse bias power supply, in practical application, the adjustment of pulse duty ratio will make the output power and output voltage change greatly, especially the duty ratio When set at 30% or below, the output power is only half of the rated power, seriously affecting production efficiency

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