Substrate support clamp for ultra-thin glass

Abstract

The invention provides a substrate support clamp for an ultra-thin glass. The substrate support clamp comprises a limiting block, a limiting spring and a limiting bolt. The limiting bolt comprises a screw rod and a head part. A through hole is formed in the limiting block. The limiting spring is arranged on the outer side of the rod part of the limiting bolt in a sleeving manner. The rod part of the limiting bolt penetrates through the through hole from the rear side of the limiting block and is fixedly connected with a substrate support. One end of the limiting spring abuts against the head part of the limiting bolt, and the other end of the limiting spring abuts against the limiting block. The limiting block can make contact with the end face of the glass, and the glass can be fixed through the limiting screw rod and the limiting spring so that when the glass is wobbled due to instable fixation and the like, the glass can be firmly attached to the interior of an inner frame of a transverse rod of the substrate support through the substrate support clamp for the ultra-thin glass, the damage to the glass can be avoided, and the yield of products can be increased; and meanwhile, due to the fact that the substrate support clamp can be compatible with glass with different thicknesses through the pressure adjustment of the limiting spring, the quantity demand for glass clamps with different thicknesses is lowered, and the production cost is reduced.

Description

technical field [0001] The invention relates to a clamp for an ultra-thin glass substrate frame. Background technique [0002] Ultra-thin glass generally has the characteristics of large size and thin glass substrate. Ultra-thin glass will be placed on the substrate holder for vacuum magnetron sputtering coating operation. At present, most of the traditional ultra-thin glass substrate holder fixtures use springs to press and hold. The glass is fixed by the way of rigid blocking on the side; however, the ultra-thin glass substrate frame fixture adopting the above structure has a high probability of causing fragments during production, thereby affecting the production cost. Contents of the invention [0003] The technical problem to be solved by the invention is to provide a simple and practical ultra-thin glass substrate holder clamp. [0004] In order to solve the above-mentioned technical problems, the present invention provides a clamp for ultra-thin glass substrates, i...

AI Technical Summary

Problems solved by technology

[0002] Ultra-thin glass generally has the characteristics of large size and thin glass substrate. Ultra-thin glass will be placed on the substrate holder for vacuum magnetron sputtering coating operation. At present, most of the traditional ultra-thin glass substrate holder fixtures use springs to press and hold. The glass is fixed by the way of hard blocking on the side; however, the ultra-thin glass substrate holder fixture with the above structure has a high probability of causing fragments during production, which affects the production cost

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