Device and method for measuring z-axis deviation angle of electro-optic crystal
An electro-optic crystal and measurement device technology, applied in the field of optical detection, can solve the problems of complex Z-axis deviation angle method, limited measurement range, and large error of the electro-optic crystal, and achieve the effect of simple measurement method, high measurement accuracy, and great application prospects
Inactive Publication Date: 2017-06-30
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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[0004] The invention provides a device and method for measuring the Z-axis deviation angle of an electro-optic crystal, which solves the problems that the existing method for measuring the Z-axis deviation angle of an electro-optic crystal is complex, has a limited measurement range or has large errors
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[0030] figure 1 It is a schematic diagram of the experimental device of the present invention, including: a laser 101, a microscopic objective lens 102, a pinhole 103, an adjustable diaphragm 104, a collimating lens 105, a polarizer 106, a mirror 107, and a beam splitting cube 108 placed in sequence according to the optical path , light screen 109, lens one 110, crystal to be measured 111, lens two 112, analyzer 113, imaging lens 114, detector 115 and computer processing system 116; Wherein, polarizer 106 and analyzer 113 polarization directions are vertical , the first lens 110 and the second lens 112 are strictly conjugate, the beam splitting cube 108, the mirror 107, the crystal to be measured 111 and the light screen 109 form a Michelson interference system.
[0031] The light emitted by the laser 101 is expanded and collimated by the microscope objective lens 102, the pinhole 103 and the collimating lens 105, and then becomes parallel light, and enters the polarizer 106 ...
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The invention discloses an electro-optic crystal Z axis deviation angle measurement device and a measurement method. The device comprises a laser (101), a microscope objective (102), a pin hole (103), an adjustable diaphragm (104), a collimating lens (105), a polarizer (106), a reflector (107), a beam splitting cube (108), an optical screen (109), a first lens (110), a to-be-measured crystal (111), a second lens (112), an analyzer (113), an imaging lens (114), a detector (115) and a computer processing system (116) which are placed in sequence along an optical path, wherein the polarizer (106) and the analyzer (113) have vertical polarized directions; the first lens (110) and the second lens (112) are strictly conjugate; and the beam splitting cube (108), the reflector (107), the to-be-measured crystal (111) and the optical screen (109) form a Michelson interference system. a Michelson interference principle is used for realizing precise crystal positioning, image matching algorithm is adopted for realizing melatope center calculation, and precise electro-optic crystal Z axis deviation angle measurement can be completed. Compared with other devices and methods, the device and the method of the invention have the advantages of high measurement precision, simple measurement method, small measurement system errors and good measurement repetition.
Description
technical field [0001] The invention relates to the field of optical detection, in particular to an electro-optic crystal Z-axis deviation angle measuring device and a measuring method. Background technique [0002] Electrode Pockels cell (PEPC) has the function of controlling laser output or isolating reflected laser, so it is often used as an important means of interstage isolation in large laser devices. The electro-optic crystal is a key component in PEPC, which determines the performance of PEPC. During the design process, its Z axis is required to be parallel to the normal of the light-transmitting surface. Therefore, it is necessary to realize high-precision measurement of the Z-axis deviation angle. [0003] The traditional method for determining the optical axis of a crystal is X-ray diffraction, but the X-ray diffractometer is expensive, requires special inspection and protective measures, and is inconvenient to use. Moreover, to measure the optical axis directio...
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IPC IPC(8): G01B11/26
Inventor 李东刘勇刘旭姜宏振张霖郑芳兰任寰杨一李文洪石振东于德强巴荣声马骅原泉周信达郑垠波杨晓瑜柴立群陈波
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS