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A micro-cantilever resonant structure sensor and its manufacturing method

A resonant structure and manufacturing method technology, applied in the field of micro-nano sensors, can solve the problem that the step of fixing sensitive materials cannot be mass-produced, and achieve the effects of easy on-chip integration, miniaturization, and low manufacturing cost

Active Publication Date: 2017-12-29
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a micro-cantilever resonant structure sensor and its manufacturing method, which is used to solve the problem that the fabrication of the micro-cantilever resonant structure and the fixing of sensitive materials in the prior art are done separately , the step of fixing sensitive materials cannot be mass-produced

Method used

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  • A micro-cantilever resonant structure sensor and its manufacturing method
  • A micro-cantilever resonant structure sensor and its manufacturing method
  • A micro-cantilever resonant structure sensor and its manufacturing method

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Embodiment 1

[0070] The invention provides a method for manufacturing a micro-cantilever resonant structure sensor, please refer to figure 1 , is shown as a process flow chart of the method, comprising the steps:

[0071] S1: A substrate is provided, and a micro-cantilever structure is formed in the substrate; the micro-cantilever structure includes a cavity formed in the substrate and a micro-cantilever beam located above the cavity; the micro-cantilever One end of the beam is fixed and the other end is free; a hydrophilic layer is formed on the surface of the micro-cantilever;

[0072] S2: forming a protective layer on the surface of the sensitive area of ​​the micro-cantilever;

[0073] S3: forming a hydrophobic molecular layer on the surface of the substrate;

[0074] S4: removing the protective layer to expose the hydrophilic layer underneath; during the process of removing the protective layer, the hydrophobic molecular layer on the surface of the protective layer is also removed, ...

Embodiment 2

[0109] The present invention also provides a micro-cantilever resonant structure sensor manufactured by the manufacturing method in the first embodiment.

Embodiment 3

[0111] The monoclonal antibody of diarrhea-causing Escherichia coli O157:H7 is used as a sensitive material to form an integrated resonant microcantilever resonant structure E. coli sensor. The previous steps of the preparation method of the integrated resonant microcantilever resonant structure E. coli sensor can refer to the description of steps S1 and S2 in Example 1, and the following steps are as follows:

[0112] Step S3: using a chemical vapor deposition process to self-organize and grow multiple FAS-17 amphiphobic molecular layers on the entire silicon wafer; and use 30% H 2 o 2 Wet removal of the Ti protective layer at 65 °C to expose the underlying SiO 2 surface or Al pad, while the rest of the FAS-17 molecular layer is not affected;

[0113] Step S4: immerse the silicon wafer in a 5% volume fraction of 3-aminopropyltriethoxysilane (APTES) ethanol solution and place it in a 37°C water bath constant temperature oscillator for 2 hours; after the reaction is completed...

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Abstract

The invention provides a method for manufacturing a micro-cantilever resonant structure sensor, comprising the following steps: providing a substrate in which a micro-cantilever structure is formed; a hydrophilic layer is formed on the surface of the micro-cantilever beam of the micro-cantilever structure; A protective layer is formed on the surface of the sensitive area of ​​the micro-cantilever; a hydrophobic molecular layer is formed on the surface of the substrate; the protective layer is removed to expose the hydrophilic layer underneath; during the process of removing the protective layer, The hydrophobic molecular layer on the surface of the protective layer is also removed, and the remaining hydrophobic molecular layer is not affected; the sensitive material is coated on the surface of the substrate, and due to the existence of the hydrophobic molecular layer, the sensitive material is concentrated on the sensitive areas. The invention seals the surface of the device through a hydrophobic or amphiphobic molecular layer, and only the sensitive area of ​​the cantilever resonant structure exposes the hydrophilic surface below, so that the sensitive material is fixed on the area of ​​the cantilever resonant structure, and the fixing of the sensitive material is realized in batches .

Description

technical field [0001] The invention belongs to the field of micro-nano sensors, and relates to a micro-cantilever resonant structure sensor and a manufacturing method thereof. Background technique [0002] With the increasing attention of the country and the public to public safety, environmental protection, food safety, medical health and other fields, as well as the continuous development of Internet of Things technology and wearable devices, biochemical sensor technology has received unprecedented attention and research. Due to the advantages of high sensitivity, fast response, small size, arrayability, and low cost, the resonant microcantilever resonant structure biochemical sensor has a good application prospect in on-site rapid biochemical detection. [0003] In general, resonant micro-cantilever resonant structure sensors are mainly composed of micro-cantilever resonant structures, sensitive materials, and interface circuits. Its working principle is as follows: a s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N5/00
Inventor 于海涛李昕欣许鹏程王家畴包宇洋
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI