Magnetic field detection sensor and magnetic field detection device using same

A technology for detecting sensors and magnetic fields, applied in measurement devices, instruments, measuring magnetic variables, etc., can solve the problems of reducing manufacturing costs and miniaturizing sensors, and achieve the effect of reducing manufacturing costs and suppressing product costs.

Active Publication Date: 2018-11-30
TDK CORPARATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, there are general issues such as reduction of manufacturing costs and miniaturization of sensors.

Method used

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  • Magnetic field detection sensor and magnetic field detection device using same
  • Magnetic field detection sensor and magnetic field detection device using same
  • Magnetic field detection sensor and magnetic field detection device using same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0045] figure 1 It is a schematic diagram of a bridge circuit constituting the magnetic field detection sensor according to the first embodiment. The bridge circuit includes a first magnetoresistance effect element 10 , a second magnetoresistance effect element 20 , a third magnetoresistance effect element 30 , and a fourth magnetoresistance effect element 40 . The fixed magnetization directions of the first to fourth magnetoresistance effect elements (10, 20, 30, 40) are the same. One end of the first magnetoresistance effect element 10 and one end of the second magnetoresistance effect element 20 are connected to the power supply terminal Vc. The other end of the first magnetoresistance effect element 10 is connected to one end of the fourth magnetoresistance effect element 40 , and the other end of the second magnetoresistance effect element 20 is connected to one end of the third magnetoresistance effect element 30 . The other end of the third magnetoresistance effect el...

Embodiment approach 2

[0062] Figure 7 and Figure 8 It is a biological field measurement device which is an example of a magnetic field detection device using the above-mentioned magnetic field detection sensor according to the second embodiment. Since one or more of the above-mentioned magnetic field detection sensors are arranged in contact with the detected part and each output is a minute signal, a lock-in amplifier circuit or the like is used in the measuring part to perform measurement. In addition, in order to remove irregular repetitive signals such as an external magnetic field or a spontaneous magnetic field, an analog filter such as a band-pass filter or digital processing such as an arithmetic mean method may be used as appropriate.

[0063] Explanation of symbols

[0064] 1 stack

[0065] 10, 20, 30, 40, 50, 60 magnetoresistance effect element

[0066] 100 Magnetic Field Generating Conductors

[0067] 200, 210 Terminal pads

[0068] 300 sense resistor

[0069] 400 differential ...

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Abstract

A magnetic field detecting sensor includes a bridge circuit which is connected to multiple magnetoresistive effect elements and is capable of outputting a differential voltage between specified connection points, a magnetic field generating conductor for providing the magnetoresistive effect elements with a magnetic field in a direction opposite to that of the detection magnetic field by disposing a magnetic body near the center of the bridge circuit, a differential operation circuit which the differential voltage is input in and makes a feedback current flow to the magnetic field generating conductor, wherein the feedback current generates the magnetic field in a direction opposite to that of the detection magnetic field in the magnetic field generating conductor, and a voltage converting circuit for outputting the feedback current as a voltage value. The magnetic field generating conductor and the magnetoresistive effect elements are formed in the same stacked body.

Description

technical field [0001] The present invention relates to a magnetic field detection sensor for detecting a minute magnetic field using a magnetoresistance effect element. Background technique [0002] In recent years, the demand for measuring weak magnetic fields such as biomagnetic field measurement, flaw detection and non-destructive testing has been increasing. [0003] In the measurement of a small magnetic field, it is important to efficiently capture the magnetic field of the detection object in the direction of magneto-sensitivity of the magnetoresistance effect element. In addition, the resistance change rate of the magnetoresistance effect element fluctuates due to changes in ambient temperature. In addition, the output of the magnetic field detection sensor fluctuates, so-called temperature drift, which becomes a problem. In addition, general issues such as reduction of manufacturing costs and miniaturization of sensors also exist. [0004] According to Patent Doc...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R33/09
CPCG01R33/09G01R33/1253
Inventor 小川明宏笠岛多闻田边圭
Owner TDK CORPARATION
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