Humidity sensor based on graphene oxide/graphene/silicon and preparation method thereof
A humidity sensor, graphene technology, applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems of incomplete integrated circuits, humidity sensors and silicon, etc., and achieve low cost, high sensitivity, and wide response range Effect
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[0023] Reference figure 1 with figure 2 , The present invention is based on the graphene oxide / graphene / silicon heterogeneous structure humidity sensor, from bottom to top there are bottom electrode 7, n-type silicon substrate 1, silicon dioxide isolation layer 2, said silicon dioxide isolation layer 2 is provided with a window 3, the upper surface of the silicon dioxide isolation layer is provided with a top electrode 4, the top electrode 4 is covered with a single layer of graphene 5 and a graphene oxide film layer 6, and the single layer of graphene 5 and the window 3 The n-type silicon substrate contacts to form a graphene / silicon Schottky junction. The boundary of the top electrode 4 is smaller than the boundary of the silicon dioxide isolation layer 2, and the boundary of the single-layer graphene 5 and the graphene oxide film layer 6 is smaller than that of the top electrode 4. Outer boundary.
[0024] Wherein, the thickness of the n-type silicon substrate is generally 30...
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