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Positioning device and positioning method of scanning electron microscope sample stage

A scanning electron microscope and positioning device technology, applied in circuits, discharge tubes, electrical components, etc., can solve the problems of difficulty in finding samples and time-consuming, and achieve the effect of improving experimental efficiency, saving time and cost, and quickly positioning.

Active Publication Date: 2016-01-06
PEKING UNIV
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Problems solved by technology

Therefore, it is very difficult and time-consuming to search for samples in the range of tens of millimeters in such a small field of view

Method used

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  • Positioning device and positioning method of scanning electron microscope sample stage
  • Positioning device and positioning method of scanning electron microscope sample stage
  • Positioning device and positioning method of scanning electron microscope sample stage

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Embodiment Construction

[0041] The present invention will be further described through the embodiments below in conjunction with the accompanying drawings.

[0042] Such as figure 1 As shown, the scanning electron microscope sample stage positioning device of the present embodiment includes: camera 11, image acquisition system adjustment frame, image acquisition system base, sample stage, positioning sample stage, image controller and data processing and output system; wherein, A sample stand and an image acquisition system adjustment stand are respectively installed on the base platform of the image acquisition system; a positioning sample stand is installed on the sample stand; a camera is installed at a position facing the positioning sample stand on the image acquisition system adjustment stand. The image controller and data processing and output system are set in the computer 7 .

[0043] The camera 11, the data transmission line 12 and the image controller constitute an image acquisition syste...

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Abstract

The invention discloses a positioning device and a positioning method of a scanning electron microscope sample stage. The positioning device comprises a camera, an image collection system adjusting bracket, an image collection system base station, a sample stage base, a positioning sample stage, an image controller and a data processing and outputting system. Through introducing the positioning sample stage and combining with image collecting and processing processes, positioning of different sample positions on the sample stage is achieved by a scanning electron microscope sample stage coordinate calibration method; the complicated and error-prone processes of searching and positioning samples through small-scale movement of the sample stage within a small view of the scanning electron microscope are omitted; accurate and rapid positioning of the samples is achieved; the experiment efficiency of the scanning electron microscope is greatly improved; and a lot of time and cost for searching and positioning the samples can be saved for a scanning electron microscope user.

Description

technical field [0001] The invention relates to scanning electron microscope sample preparation, in particular to a scanning electron microscope sample stage positioning device and a positioning method thereof. Background technique [0002] Scanning electron microscope (abbreviated as scanning electron microscope) is a large-scale scientific instrument used to observe and study the morphology, composition and photoelectric properties of micro-nano scale materials. When using the scanning electron microscope to observe the material (sample) to be studied, the material needs to be carried on the sample stage of the scanning electron microscope; the sample stage is fixed on the scanning electron microscope sample stand, and the sample is observed by manipulating the spatial position of the scanning electron microscope sample stand Morphology, composition and other properties at different positions. [0003] In order to observe different samples on the sample stage or different...

Claims

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Application Information

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IPC IPC(8): H01J37/20
Inventor 朱瑞徐军刘亚琪
Owner PEKING UNIV
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