Local bearing type active vibration isolation device capable of being applied to ultrahigh vacuum system

Abstract

A local bearing type active vibration isolation device capable of being applied to an ultrahigh vacuum system comprises a vacuum cavity (103), a rigid datum platform (101), supporting columns (102), flexible connection sections (201) and active vibration isolation supports (119). The vacuum cavity (103) is arranged on the ground and is fixedly connected with the flexible connection sections (201) and the active vibration isolation supports (119) in sequence; the active vibration isolation supports (119) are arranged on the ground. The active vibration isolation supports (119) generate the dynamic position compensation function in the vertical direction and isolate vibration from the ground; the flexible connection sections (201) comprise corrugated pipes (108), one-dimensional movement generated by the active vibration isolation supports (119) is ensured, and vacuum sealing is also ensured. In addition, the corrugated pipes (108) isolate vibration from a vacuum pump through elastic deformation. The active vibration isolation supports (119) do not bear the weight of the whole vacuum system, so that the active vibration isolation supports (119) have no limit to weight of the vacuum cavity (103).

Description

technical field [0001] The invention relates to a vibration isolation device, in particular to an active vibration isolation device. Background technique [0002] The Italian ALTA company has a set of ultra-high vacuum equipment using an active vibration isolation system, which is used to measure the tiny thrust generated by the electric thruster. Its system structure is as figure 1 shown. The system adopts the mature active vibration isolation support on the market to directly support the entire vacuum chamber. The vacuum chamber and the active vibration isolation support as well as the equipment installation platform inside the vacuum chamber and the vacuum chamber are rigidly connected. [0003] Because the system uses active vibration isolation brackets, it can effectively isolate external vibrations from the ground, such as vibrations caused by people walking around the equipment, nearby street vehicles, and even underground rail traffic. The vibration isolation effic...

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Problems solved by technology

Although the system can effectively isolate the external vibration from the ground, it cannot isolate the vibration generated by the vacuum pump on the vacuum chamber

Since the most commonly used turbomolecular pumps and cryopumps in ultra-high vacuum systems will produce obvious vibrations during normal operation, and the above two vacuum pumps are directly rigidly connected to the vacuum chamber, this will cause the vibration of the vacuum pump body to be along the The wall of the vacuum chamber is passed unimpededly to the platform where the precision equipment is placed in the chamber, resulting in the failure of the precision equipment to work normally

[0006] (2) Narrow application range

Due to the inability to isolate the impact of the vibration of the vacuum pump on the system, the Italian company ALTA could not use the first two types of ultra-high vacuum pumps with strong gas load capacity, but could only use the latter two ultra-high vacuum pumps with weaker gas load capacity. It is applied to the electric thrusters with very little gas supply or even no gas supply at all. The thrust range can only cover the μN level, and cannot be applied to the mN level electric thrusters with large gas supply such as mainstream Hall thrusters and ion thrusters. Thruster

[0007] (3) The weight and dimensions of the vacuum chamber are limited

At present, the mainstream electric thrusters generally need to work normally in a large vacuum chamber with a diameter of 2m-6m and a length of 5m-10m. The weight of a vacuum chamber of this scale is greater than 6t, which is completely unable to carry the active vibration isolation support.

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