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Humidity sensor and preparation method thereof

A humidity sensor and humidity-sensitive material technology, applied in the direction of material capacitance, etc., can solve the problems of reducing the sensor’s humidity measurement sensitivity and small overall capacitance change rate, and achieve the effect of increasing effective humidity-sensitive capacitance, reducing parasitic capacitance, and improving performance

Active Publication Date: 2016-01-13
SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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  • Abstract
  • Description
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Problems solved by technology

[0006] In the structure of the above-mentioned existing interdigitated capacitive humidity sensor, since there are parasitic capacitances C2-C4, and this part of the parasitic capacitance will not change correspondingly with the ambient humidity, the overall capacitance measured by the humidity sensor will be The rate of change tends to be small, reducing the sensor's humidity measurement sensitivity

Method used

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  • Humidity sensor and preparation method thereof
  • Humidity sensor and preparation method thereof
  • Humidity sensor and preparation method thereof

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Embodiment Construction

[0031] The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0032] It should be noted that, in the following specific embodiments, when describing the embodiments of the present invention in detail, in order to clearly show the structure of the present invention for the convenience of description, the structures in the drawings are not drawn according to the general scale, and are drawn Partial magnification, deformation and simplification are included, therefore, it should be avoided to be interpreted as a limitation of the present invention.

[0033] In the following specific embodiments of the present invention, please refer to figure 2 , figure 2 It is a structural schematic diagram of a humidity sensor in a preferred embodiment of the present invention. Such as figure 2 As shown, a humidity sensor of the present invention includes a silicon wafer substrate 301 , an insulating laye...

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Abstract

The present invention discloses a humidity sensor and a preparation method thereof. According to the present invention, moisture-sensitive material layers are respectively arranged below, on the side surface of and above an interdigital electrode to form the structure for wrapping the interdigital electrode in the moisture-sensitive material so as to increase the volume of the moisture-sensitive material, increase the effective moisture-sensitive capacitance, and reduce the parasitic capacitance, such that the sensitivity of the humidity sensor is improved, and the performance of the sensor is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing and preparation, and more specifically, to a humidity sensor and a preparation method. Background technique [0002] Humidity, usually refers to the content of water vapor in the air, used to reflect the dryness and humidity of the atmosphere. Human daily life, industrial and agricultural production activities, and the survival and growth of animals and plants are all closely related to the humidity of the surrounding environment. The humidity sensor is used to measure humidity. It is based on the characteristics of humidity-sensitive functional materials that can produce physical effects or chemical reactions related to humidity. It realizes the measurement function by converting the physical quantity of humidity into an electrical signal. [0003] Humidity sensors can be divided into telescopic type, evaporative type, dew point meter, electronic type, electromagnetic type, etc....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/22
Inventor 李铭左青云
Owner SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT