Lens group hoisting leveling device capable of two-degree-of-freedom adjustment

Abstract

The present invention provides a lens group hoisting leveling device capable of two-degree-of-freedom adjustment, belonging to the technical field of optical integration assembly. In order to eliminate the possible risk of quality accident due to stable control when an operator adjusts the thick and heavy lens group during the lens group cascade process, two-degree-of-freedom adjustment components are arranged above a hoisting plate, the hoisted lens group is connected with the lower part of the hoisting plate through a drawing bar component of a hoisting device, and two digital display level gauge components are perpendicular mutually and are arranged on two ends of the upper part of the hoisting plate separately. An oilless copper alloy gasket of the two -degree-of-freedom adjustment components tightly tightly connects the hoisting plate. The lower end face of a sliding block and the upper end face of a base plate contact with the oilless copper alloy gasket. A hoisting ring is arranged on the upper end of a connecting shaft. A pair of adjustment blocks are symmetrically arranged on two orthogonal directions of the sliding block, and the adjustment blocks connect the hoisting plate. An adjustment screw connects the middle part of the adjustment block, and the top of the adjustment screw is tightly pressed against the sliding block. The leveling of the hoisted lens group is realized by the turn of the adjustment screw.

Description

technical field [0001] The invention relates to a mirror group hoisting and leveling device capable of two-degree-of-freedom adjustment, which belongs to the technical field of optical integrated assembly. Background technique [0002] In order to meet the needs of technological development, the current optical system is developing towards the characteristics of large aperture and high numerical aperture, which makes the size and weight of the objective lens continue to increase. For example, the deep ultraviolet lithography projection objective lens, the maximum aperture of the objective lens Reach more than 300mm, the center thickness of the lens reaches 55mm, and the weight of a single lens exceeds 6Kg. In addition, in order to obtain optical performance with extremely small aberrations, it is necessary to design a complex and stable lens support structure, which requires the use of stainless steel materials. In order to achieve this stable effect, it is necessary to inc...

AI Technical Summary

Problems solved by technology

In this case, if the mirror group to be integrated has a certain inclination relative to the horizontal on the mirror group hoisting device, then during the cascading process of the mirror group, it may cause a collision between the mirror and the mirror, or the collision between the mirror and the supporting structure. The occurrence of serious quality accidents such as collisions between

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